2011
DOI: 10.1016/j.scriptamat.2011.06.001
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Dislocation plasticity of Al film on polyimide investigated by cross-sectional in situ transmission electron microscopy straining

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Cited by 12 publications
(4 citation statements)
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“…During sputter deposition of the first Al layer, a homogeneous interlayer (thickness % 5 nm) is formed between PI and Al (Figure 2). Such interlayers have been previously reported in the literature for evaporated Ti and Al thin films [51][52][53] on polyimide and polymer layers spin-coated onto Al, [54] and are associated with high interfacial quality (good adhesion). However, the influence of the deposition method on metalpolymer interface structure is widely unknown.…”
Section: Interface Structure-adhesionsupporting
confidence: 66%
“…During sputter deposition of the first Al layer, a homogeneous interlayer (thickness % 5 nm) is formed between PI and Al (Figure 2). Such interlayers have been previously reported in the literature for evaporated Ti and Al thin films [51][52][53] on polyimide and polymer layers spin-coated onto Al, [54] and are associated with high interfacial quality (good adhesion). However, the influence of the deposition method on metalpolymer interface structure is widely unknown.…”
Section: Interface Structure-adhesionsupporting
confidence: 66%
“…Studies focusing on interface formation found that chemical reactions between metal atoms and functional groups of certain substrates can form complexes and cause the formation of a thin interlayer between the metal and the polymer. In the case of the Al‐PI system studied in this work, the presence of such an Al‐O‐C interlayer has been shown (amorphous microstructure, thickness 3.6 nm) and was attributed to good interfacial adhesion …”
Section: Introductionmentioning
confidence: 70%
“…Moreover, any outside layer could hinder dislocations from escaping at the sample surface, leading to the formation of a pile-up as recently reported for example for polyimide on an Al film. 79 In our case, the detachment of the contamination film indicates no strong binding to the Cu pillar 80 and should therefore be of minor concern.…”
Section: Surface Pillar Compressionmentioning
confidence: 60%