2016
DOI: 10.1038/srep22410
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Disentanglement of growth dynamic and thermodynamic effects in LaAlO3/SrTiO3 heterostructures

Abstract: The influence of non-equilibrium and equilibrium processes during growth of LaAlO3/SrTiO3 (LAO/STO) heterostructures is analyzed. We investigate the electronic properties of LAO/STO heterostructures obtained at constant growth conditions after annealing in different oxygen atmospheres within the typical growth window (1 × 10−4 mbar –1 × 10−2 mbar). The variation of annealing conditions is found to cause a similar change of electronic properties as observed for samples grown in different oxygen pressure. The re… Show more

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Cited by 35 publications
(62 citation statements)
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“…For this, we choose LAO grown on STO as it is a very p ox sensitive system. This system shows interface conduction, when the STO substrate is not reduced, and additional bulk conduction, when STO is reduced7162123. Thus LAO/STO has the advantage of a measurable sheet carrier concentration at room temperature even if the STO substrate is not reduced.…”
Section: Relevance For Low Pressure Depositionsmentioning
confidence: 98%
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“…For this, we choose LAO grown on STO as it is a very p ox sensitive system. This system shows interface conduction, when the STO substrate is not reduced, and additional bulk conduction, when STO is reduced7162123. Thus LAO/STO has the advantage of a measurable sheet carrier concentration at room temperature even if the STO substrate is not reduced.…”
Section: Relevance For Low Pressure Depositionsmentioning
confidence: 98%
“…Another explanation often found in literature is the oxidization of the growing thin film by the STO substrate, eventually resulting in the reduction of the substrate293031. However, as soon as the plume is turned off one would expect the oxygen content of the sample to approach the equilibrium value and thus to reoxidize at a certain rate within the PLD chamber21.…”
mentioning
confidence: 98%
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