Directly coupled superconducting quantum interference device magnetometer fabricated in magnesium diboride by focused ion beam

Burnell, Gavin; Kang, Dae Joon; Ansell, D.A.; Lee, H.-N.; Moon, Seung‐Hyun; Tarte, E.J.; Blamire, M. G.

doi:10.1063/1.1491599

Cited by 35 publications

(29 citation statements)

References 23 publications

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“…The process in this case relies on the presence of a layer of suppressed superconductivity at the base of the trench cut by the FIB; however it is unclear whether this is directly induced by Ga-ion damage or was intrinsic to the films used in the experiments. Despite the variable quality of early MgB 2 films we were able to demonstrate good SQUID performance using FIB planar Josephson junctions [19]. A variant of the process has also been used to fabricate junctions in YBa 2 Cu 3 O 7−δ via ion irradiation through focused ion beam cuts in a Au mask [13].…”

Section: Planar Sns Junction Fabrication and Characterisationmentioning

confidence: 99%

Focused ion beam fabrication and properties of nanoscale Josephson junctions for sensors and other applications

Blamire

Bell

Burnell

et al. 2005

phys. stat. sol. (c)

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PACS 74.50.+r, 74.81.Fa, 85.25.Cp, The methods of superconducting device fabrication by lithography and multilevel processing usually require a number of processing steps with lithographic resolution and alignment adequate for the scale of the device be fabricated. As an alternative, the focused ion beam (FIB) microscope is increasingly being used directly to fabricate devices. A major advantage of using a FIB compared to other lithography methods is its flexibility and high resolution. It allows in-situ, milling (~5 nm at a beam current of 1 pA) to a variety of depths, and imaging (2 nm) of the sample. In this paper we describe our development of junction fabrication techniques using the FIB and their application in creating a range of potential sensor devices and quantum electronics applications.1 Introduction Focused ion beam (FIB) systems offer the ease of use of a scanning electron microscope (SEM) but with sectioning and cross-sectional imaging capabilities which SEMs lack. Historically, their development was driven by the semiconductor production industry but their increasing availability within research institutions has enabled the development of new applications making widespread the use and development of these techniques.In a typical FIB system a focused ion-beam ejected from a liquid metal ion source (usually Ga), with a spot size of less than 10 nm, is scanned across a sample in a manner analogous to a SEM. Imaging using secondary electrons provides surface information with similar resolution to that obtainable from an SEM; however the main applications arise from the use of ions as the scanned species. These include compositional imaging via secondary ions, direct etching of material in selected regions for in-situ sectioning and imaging, microfabrication, transmission electron microscopy specimen preparation, and localised deposition and implantation of metal and insulator structures. The unique combination of 10 nm resolution imaging with the ability both to remove and to deposit material in selected areas provides a means of performing experiments which would otherwise be impossible or unreasonably timeconsuming.At its most general, a Josephson junction consists of two superconducting electrodes separated by a weak-link in which superconductivity is eliminated or suppressed: for example by an insulating tunnel barrier in a superconductor -insulator -superconductor (SIS) junction or by a thin non-superconducting metal layer in a superconductor -normal -superconductor (SNS) junction. All Josephson junctions for

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Section: Planar Sns Junction Fabrication and Characterisationmentioning

confidence: 99%

Focused ion beam fabrication and properties of nanoscale Josephson junctions for sensors and other applications

Blamire

Bell

Burnell

et al. 2005

phys. stat. sol. (c)

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“…Burnell et al demonstrated that the voltage-flux characteristics of dc SQUIDs consisting of VTB junctions can be clearly observed when the trench depth in the microbridge is 70-80% of the film thickness [11], [12]. The VTB weak link was constructed by etching a 50 nm-wide track on a 4 -wide film line using a focused ion beam (FIB).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Properties of High-$T_{\rm c}$ YBCO Josephson Junction and SQUID With Variable Thickness Bridges by Focused Ion Beam

Jhan

Chen

et al. 2011

IEEE Trans. Appl. Supercond.

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We have successfully fabricated YBCO Josephson junctions and SQUIDs with variable thickness bridges. The variable-thickness bridges of YBCO thin film were fabricated by photolithography and Focused ion beam mill. The Josephson effects of variable thickness bridges were obtained in a 80 nm-thick-film of high-c YBa 2 Cu 3 O y . The Shapiro steps were observed in single junction in the gigahertz range from 3.02 to 14.64 GHz. The voltage-current and voltage-field characteristics were measured in SQUID magnetometer. The SQUID shows a peak-to-peak voltage swing of 1.5 V at 70 K. The properties of one junction and SQUID magnetometer have been investigated. Index Terms-Focused ion beam, Josephson junction, variable thickness bridges.

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“…For several application purposes, thin films are required. One such application is Josephson junctions [10][11][12] which have potential use in various applications, such as superconducting quantum interference device (SQUID) [13,14], single flux quantum (SFQ) circuit. To date several methods have been reported mainly hybrid physical chemical vapour deposition (HPCVD) [15][16][17], pulsed laser deposition (PLD) [18,19], electron beam evaporation [20], molecular beam epitaxy [21][22][23], ion beam [24] and sputtering [25,26] for deposition of MgB 2 thin films.…”

Section: Introductionmentioning

confidence: 99%

Effect of film thickness on the transport properties of MgB2 synthesized by spray pyrolysis

Shekhar

Srivastava

2011

Physica C: Superconductivity

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Directly coupled superconducting quantum interference device magnetometer fabricated in magnesium diboride by focused ion beam

Cited by 35 publications

References 23 publications

Focused ion beam fabrication and properties of nanoscale Josephson junctions for sensors and other applications

Focused ion beam fabrication and properties of nanoscale Josephson junctions for sensors and other applications

Fabrication and Properties of High-$T_{\rm c}$ YBCO Josephson Junction and SQUID With Variable Thickness Bridges by Focused Ion Beam

Effect of film thickness on the transport properties of MgB2 synthesized by spray pyrolysis

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