Direct, simultaneous determination of XPS background and inelastic differential cross section using Tougaard's algorithm

Jo, Masatoshi

doi:10.1016/0039-6028(94)91270-x

Cited by 20 publications

(2 citation statements)

References 18 publications

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“…The XPS core-level spectra were fitted using symmetric pseudo-Voigt functions after subtracting a Tougaard background. 26 The full width at half-maximum (fwhm) of each component was set equal for all spectra of the same region, whereas the energy positions were allowed to vary only within a narrow energy range. XPS analysis was performed using CasaXPS software (version 2.3.20rev1.1e, CASA Software Ltd.).…”

Section: Methodsmentioning

confidence: 99%

“…The atomic concentrations were estimated by considering the raw areas of the respective core levels after background removal and weighting by the corresponding atomic sensitivity factor. The XPS core-level spectra were fitted using symmetric pseudo-Voigt functions after subtracting a Tougaard background . The full width at half-maximum (fwhm) of each component was set equal for all spectra of the same region, whereas the energy positions were allowed to vary only within a narrow energy range.…”

Section: Methodsmentioning

confidence: 99%

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Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films

Morales,

Plate,

Marth

et al. 2024

ACS Appl. Electron. Mater.

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We present a successful bottom-up approach to design a generic plasma-enhanced atomic layer deposition (PEALD) supercycle recipe to grow high-quality indium gallium zinc oxide (IGZO) thin films with tunable composition at a relatively low temperature of 150 °C. In situ real-time ellipsometric characterization in combination with ex situ complementary techniques has been used to optimize the deposition process and quality of the films by identifying and solving growth challenges such as degree of oxidation, nucleation delays, or elemental composition. The developed supercycle approach enables facile control of the target composition by adapting the subcycle ratios within the supercycle process. Compared to other low-temperature deposition techniques resulting in amorphous films, our PEALD–IGZO process at 150 °C results in nearly amorphous, nanocrystalline films. The preparation of IGZO films at low temperature by a supercycle PEALD approach allows controlling the thickness, composition, and electrical properties while preventing thermally induced segregation.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films

Morales,

Plate,

Marth

et al. 2024

ACS Appl. Electron. Mater.

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XPS inelastic background optimization: algorithm and results

2003

Surface & Interface Analysis

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The x-ray photoelectron spectrum of a solid is a superposition of the peaks and the inelastic background. Using the background optimization technique it is possible to make a precise separation of them. The separated peaks and background have shown very physically consistent results in relation to the peak intensity, peak shape, loss function, etc. The most remarkable point of the present formalism is that very little sample-specific knowledge is needed for the analysis. In this paper, details of the method and the results obtained both previously and recently on the metals Cu, Al and Ag will be reviewed.

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Fast simulation of XPS and AES spectra by transformations of electron trajectories

Alkemade

1995

Surface & Interface Analysis

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A new Monte Carlo simulation model is presented for the calculation of XPS or AES spectra of homogeneous or near-homogeneous solids. The model is at least one order of magnitude faster than conventional simulation models. The increase in computation efficiency is obtained by translations and rotations of simulated electron trajectories.Simulations have been applied to evaluate a number of models for inelastic and elastic scattering. In addition, a succesrful comparison is made between simulated and measured XPS spectra of A1 and of Ag over a range of 600 eV.

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Direct, simultaneous determination of XPS background and inelastic differential cross section using Tougaard's algorithm

Cited by 20 publications

References 18 publications

Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films

Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films

XPS inelastic background optimization: algorithm and results

Fast simulation of XPS and AES spectra by transformations of electron trajectories

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