Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films
Carlos Morales,
Paul Plate,
Ludwig Marth
et al.
Abstract:We present a successful bottom-up approach to design
a generic
plasma-enhanced atomic layer deposition (PEALD) supercycle recipe
to grow high-quality indium gallium zinc oxide (IGZO) thin films with
tunable composition at a relatively low temperature of 150 °C. In situ real-time ellipsometric characterization in combination
with ex situ complementary techniques has been used
to optimize the deposition process and quality of the films by identifying
and solving growth challenges such as degree of oxidation, nuc… Show more
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