Direct processing of PbZr0.53Ti0.47O3 films on glass and polymeric substrates

Abstract

This work reports on direct crystallization of PbZr 0.53 Ti 0.47 O 3 (PZT) thin films on glass and polymeric substrates, through the use of pulsed thermal processing (PTP). Specifically a xenon flash lamp is used to deliver pulses of high intensity, short duration broadband light to the surface of a chemical solution deposited thin film, resulting ultimately in the crystallization of the film. Structural analysis by X-ray diffraction and transmission electron microscopy show the existence of perovskite structure in nano-sized grains (≤ 5nm). Local functional analysis by band excitation piezoelectric spectroscopy and electrostatic force microscopy confirm presence of a ferroelectric phase and retention of voltage-written polarization for multiple days.

Maximizing Information: A Machine Learning Approach for Analysis of Complex Nanoscale Electromechanical Behavior in Defect‐Rich PZT Films

“…In general, the film appears to be well-crystallized and ordered, although local defects and regions of disorder are present, as expected due to the large thermal gradients during crystallization. [29] AFM topography (Figure 1e) confirms the polycrystalline structure, with grain sizes varying from tens to hundreds of nano meters, similar to the TEM observations. The specific location studied via AFM techniques has a significantly rougher surface compared to that studied by TEM (Figure 1b), with 37 versus 10 nm max peak-to-peak variation, respectively.…”

“…In general, the film appears to be well‐crystallized and ordered, although local defects and regions of disorder are present, as expected due to the large thermal gradients during crystallization. [ 29 ]…”

“…Such pores could be a result of energy transfer concentration (and localized temperature increase) in proximity of the Pt bottom electrode during crystallization, and hence fast organic removal. [29][30][31] Looking closer at the surface region (highlighted by the red square, Figure 1b), an atomic resolution image (Figure 1c) shows clear atomic ordering and crystallinity, along with a smaller (≈10 nm) defect within the grain, (highlighted by a red circle). The selected area diffraction pattern (SADP) in Figure 1d shows strong texturing along the <100> zone axis, although the slight streaking of spots implies some disorder with other orientations also present.…”

“…As a case study, we investigate and classify the local band excitation piezoelectric spectroscopy (BEPS) switching response in a defect‐rich Pb(Zr 0.53 ,Ti 0.47 )O 3 thin film, fabricated via chemical solution deposition and a novel pulsed thermal processing (PTP) crystallization technique on a glass substrate. [ 29 ] PTP enables direct processing of ferroelectric films on substrates with limited thermal tolerance, through plasma arc heating delivered in microsecond pulses, and leads to a wide variety of defects (i.e., nanoscale grain sizes, porosity and secondary phases). [ 29 ] Such microstructural variations result in non‐piezoelectric phenomena coupling with piezoelectricity and dominating the electromechanical response.…”

“…[ 29 ] PTP enables direct processing of ferroelectric films on substrates with limited thermal tolerance, through plasma arc heating delivered in microsecond pulses, and leads to a wide variety of defects (i.e., nanoscale grain sizes, porosity and secondary phases). [ 29 ] Such microstructural variations result in non‐piezoelectric phenomena coupling with piezoelectricity and dominating the electromechanical response. The resultant decrease in the signal‐to‐noise ratio of the PFM data results in challenging to impossible extraction of reliable information about the local ferroelectric behavior.…”