Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >2nm. The quality factor remains >200,000. OCIS codes: (230.5298) Photonic crystals; (140.3945) Microcavities; (130.5296) Photonic crystal waveguides 1. Introduction: Photonic crystal nanocavities are increasingly employed in a range of photonic studies and applications because of their high Q/V m ratios [1]. For applications such as optical EIT [2] and cavity QED [3], accurate control of the resonant wavelength is critical. However, due to fabrication imperfections, resonances will deviate from their desired values. Many post-fabrication tuning techniques have been proposed and demonstrated. These methods can be separated into two categories: global and local. Global tuning methods create uniform changes to the entire photonic chip. Local tuning methods only modify a specific cavity region [4]. Laser-assisted thermal-oxidation tuning has been demonstrated on a GaAs L3 photonic crystal cavity with low-Q of 1800 [5].Deutschmann and Huber have previously studied the local oxidation of SOI substrates [6,7]. Here we demonstrate local oxidation tuning of a silicon photonic crystal double-heterostructure with an initial ultra-high-Q > 300,000. A 532 nm wavelength continuous wave laser beam is focused onto the cavity center with a total incident power of approximately 20 mW. The experiment was conducted at ambient room conditions with a relative humidity of 20%. The cavity mode is blue-shifted > 2 nm while maintaining an ultra-high-Q > 200,000. A larger tuning range should also be achievable. Faster tuning times are also possible using higher incident powers. This tuning method is well suited for complete automation, by using a computer-controlled stage and in-situ monitoring. This would enable the post-fabrication fine-tuning of massive numbers of nanocavities.