Direct measurement of stress-induced void growth by thermal wave modulated optical reflectance image

Smith, L.W.; Welles, C.; Bivas, A.; Yost, F.G.; Campbell, James E.

doi:10.1109/relphy.1990.66087

Cited by 3 publications

(1 citation statement)

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“…6,7 The thermal wave technique ͑thermal wave modulated optical reflectance imaging͒ which was reported by Smith et al could detect early-stage failures, such as voids, without the application of any voltage or current. 8 This technique generates void images by detecting the reflectance change depended on metal surface temperature as a pulsed laser is irradiated. This technique uses two cofocused laser beams, so that it is necessary to scan the sample stage, rather than the laser beams, mechanically to obtain the thermal wave image.…”

Section: Introductionmentioning

confidence: 99%

Detection of defects in metal interconnects by the nonbias-optical beam induced current technique

Kõyama

Sonoda

Komori

et al. 1999

Journal of Applied Physics

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The mechanism for detecting defects by the nonbias-optical beam induced current technique is clarified by examining images and conducting simulations. This technique, using an electromotive current as a result of optical laser irradiation with no application of voltage, is very useful for analysis of metal interconnect failure in ultra large scale integrated devices. The characteristic images obtained by this technique, consisting of pairs of bright and dark regions, reveal point defects, such as voids in metal stripes and vias. It is found, by examining the characteristic images of defects, that the electromotive current generated near the defects originates as a result of the thermoelectromotive effect. Furthermore, it is confirmed by thermal simulations and transient current simulations, that the asymmetric temperature profiles near the defects generate the electromotive current and show the characteristic images.

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Section: Introductionmentioning

confidence: 99%