2004
DOI: 10.1038/nmat1155
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Direct laser writing of three-dimensional photonic-crystal templates for telecommunications

Abstract: The past decade has witnessed intensive research efforts related to the design and fabrication of photonic crystals. These periodically structured dielectric materials can represent the optical analogue of semiconductor crystals, and provide a novel platform for the realization of integrated photonics. Despite intensive efforts, inexpensive fabrication techniques for large-scale three-dimensional photonic crystals of high enough quality, with photonic bandgaps at near-infrared frequencies, and built-in functio… Show more

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Cited by 1,015 publications
(773 citation statements)
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“…[11] In this report, we fabricate high-quality polymeric 3D spiral photonic crystals via direct laser writing. [12][13][14] The measured transmittance spectra of these low-index-contrast structures reveal spectral regions where the transmittance is below 5 % for one circular incident polarization and above 95 % for the other-for just eight lattice constants along the propagation direction. The experimental data are compared with scattering-matrix calculations [15,16] for the actual finite structures, leading to good agreement.…”
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confidence: 96%
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“…[11] In this report, we fabricate high-quality polymeric 3D spiral photonic crystals via direct laser writing. [12][13][14] The measured transmittance spectra of these low-index-contrast structures reveal spectral regions where the transmittance is below 5 % for one circular incident polarization and above 95 % for the other-for just eight lattice constants along the propagation direction. The experimental data are compared with scattering-matrix calculations [15,16] for the actual finite structures, leading to good agreement.…”
mentioning
confidence: 96%
“…[12][13][14] Details of our process based on the commercial thick-film resist SU-8 can be found in the Experimental section and in earlier work. [13] Our structures are mechanically supported by a 2D network of bars at, or close to, the top of the 3D crystal. As the spirals are not at all mechanically connected to their neighbors, very unstable low-quality structures would result without this grid.…”
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confidence: 99%
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“…An exciting possibility in this context is provided by direct laser writing 22,23 , which ensures large flexibility in the shape of the realizable 3D metamaterial inclusions. Broadband infrared circular polarizers based on gold helical metamaterials 1 have been recently demonstrated using this technique; however, realizing these structures in the visible is hindered by the minimum realizable features imposed by the diffraction limit.…”
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confidence: 99%
“…By scanning the fabrication voxel through reagent solution, complex three-dimensional microscale objects 1,5 have been produced with lateral feature sizes as small as ∼120 nm using synthetic materials 1 and ∼250 nm using proteins. 4 Figure 1A demonstrates our approach for mask-directed multiphoton lithography.…”
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confidence: 99%