2010
DOI: 10.1038/nphoton.2009.250
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Direct laser writing

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Cited by 96 publications
(68 citation statements)
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“…17 In order to create three-dimensional compound parabolic concentrator structures which redirect transmitted light, a Nanoscribe photonic professional two-photon lithography system was used. 18 The lithography system focuses an expanded 785 nm laser beam to a diffraction-limited spot at a point where it catalyzes a chemical change in a photoresist (IP-L). This allows the user to write a single voxel instead of a column, allowing three-dimensional structures to be written.…”
mentioning
confidence: 99%
“…17 In order to create three-dimensional compound parabolic concentrator structures which redirect transmitted light, a Nanoscribe photonic professional two-photon lithography system was used. 18 The lithography system focuses an expanded 785 nm laser beam to a diffraction-limited spot at a point where it catalyzes a chemical change in a photoresist (IP-L). This allows the user to write a single voxel instead of a column, allowing three-dimensional structures to be written.…”
mentioning
confidence: 99%
“…[30] Today, more and more, 2PP becomes the dominant field of invention because of the versatility of the process to build 3D structures of almost any desired complexity and material. [31][32][33][34][35][36][37][38] The most frequently used materials are radicalic reacting (meth-)acrylic negative-tone resists: organically modified ceramics (ORMO-CER, [39][40][41] commercial acrylic monomers, [42] elastic polydimethylsiloxane (PDMS), [43,44] hydrogel materials [poly-(ethylene glycol diacrylate) (PEGDA) and acrylamide], [45][46][47] and chitosan containing resins. [48] Cationic polymerizable epoxides (e.g., SU-8) in combination with photo acid generators (PAGs) [49] and positive type resists [50,51] have been applied in 2PP as well.…”
mentioning
confidence: 99%
“…New concepts are constantly explored, involving surface plasmons [1], plasmonic metasurfaces [2], or novel birefringent designs [3], and offer solutions to polarization control in a broad range of frequencies from visible up to terahertz. Among them, recent developments in three-dimensional sub-micron-resolution two-photon laser photolithography (direct laser writing) techniques [4,5], combined with electrochemical metal deposition on a positive resist molds led to spectacular demonstration of high-aspect-ratio helical spring-like all metal structures [6]. These were verified to perform as transmission broadband circular polarizers, covering one octave in the mid-infrared between 3.2 and 6.4 μm.…”
Section: Introductionmentioning
confidence: 99%