2010
DOI: 10.1063/1.3503972
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Direct growth of few-layer graphene on 6H-SiC and 3C-SiC/Si via propane chemical vapor deposition

Abstract: We propose to grow graphene on SiC by a direct carbon feeding through propane flow in a chemical vapor deposition reactor. X-ray photoemission and low energy electron diffraction show that propane allows to grow few-layer graphene (FLG) on 6H-SiC(0001). Surprisingly, FLG grown on (0001) face presents a rotational disorder similar to that observed for FLG obtained by annealing on (000–1) face. Thanks to a reduced growth temperature with respect to the classical SiC annealing method, we have also grown FLG/3C-Si… Show more

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Cited by 72 publications
(71 citation statements)
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“…The most widespread approach consists in heating SiC to a high enough temperature for silicon to sublimate from the surface, leaving behind carbon atoms that may then form graphene. A less studied approach (especially from the point of view of the processes at play during growth) involves molecular beam epitaxy [248,107] and CVD [249,250] on SiC. In this section we review experimental observations of graphene growth using methods mentioned above.…”
Section: Growth Methodsmentioning
confidence: 99%
“…The most widespread approach consists in heating SiC to a high enough temperature for silicon to sublimate from the surface, leaving behind carbon atoms that may then form graphene. A less studied approach (especially from the point of view of the processes at play during growth) involves molecular beam epitaxy [248,107] and CVD [249,250] on SiC. In this section we review experimental observations of graphene growth using methods mentioned above.…”
Section: Growth Methodsmentioning
confidence: 99%
“…[24,25] Depending on the growth conditions, either the samples are hole-doped and the graphene lies on a hydrogen-passivated SiC surface, or they are n-doped and the graphene lies on a carbon-rich buffer layer. [26,27].…”
Section: Methodsmentioning
confidence: 99%
“…Silicon sublimes from the surface layers while the carbon atoms left behind on the surface form a carbon buffer layer and graphene layer(s). Epitaxial growth of a few layer graphene on SiC has also shown to be possible through chemical vapor deposition of carbon on the surface using propane as a source gas under optimized growth conditions [12,13]. Other methods to obtain large area graphene include chemical vapor deposition (CVD) growth on metals [14][15][16].…”
Section: Introductionmentioning
confidence: 99%