2009
DOI: 10.1109/tnano.2009.2013137
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Direct Electron-Beam Patterning of Teflon AF

Abstract: Teflon AF thin films have been directly patterned by electron-beam lithography without the need for chemical development. The pattern depth was found to be linearly related to exposure dose and increases with increasing film thickness. Features as small as 200 nm have been resolved. Fourier transform infrared measurements indicate that the electron-beam-induced patterning is related to degradation of the fluorinated dioxole group present in amorphous Teflon.

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Cited by 9 publications
(14 citation statements)
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“…For the given thickness of the Teflon AF film, exposure doses greater than 1500 μC cm –2 did not cause further changes, neither in trench depth nor in surface potential (data not shown). Note that Karre et al also reported a dependency of trench depths on the total thickness of the Teflon AF film …”
Section: Resultsmentioning
confidence: 91%
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“…For the given thickness of the Teflon AF film, exposure doses greater than 1500 μC cm –2 did not cause further changes, neither in trench depth nor in surface potential (data not shown). Note that Karre et al also reported a dependency of trench depths on the total thickness of the Teflon AF film …”
Section: Resultsmentioning
confidence: 91%
“…Note that Karre et al also reported a dependency of trench depths on the total thickness of the Teflon AF film. 48 X-ray photoelectron spectroscopy (XPS) oxygen analysis revealed further clues with respect to the chemical modifications in the polymer following e-beam irradiation. Our experiments show the appearance of a Independently conducted water contact angle measurements on larger areas showed a decrease from 118 to 94°for as-spun and irradiated surfaces, respectively (Supporting Information SI1).…”
Section: Resultsmentioning
confidence: 99%
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“…The feature size of such structures can be as low as 1.8 μm, while the gaps between Teflon AF features can be smaller than 1 μm. Only methods involving expensive mask-less irradiation are known to give better pattern resolution of Teflon AF or other fluorocarbon films. Furthermore, our fabrication technique allows the patterned Teflon AF to be used in small-scale biologically inspired applications. We show that the distinct topographical edge feature of the Teflon AF structures we produce is especially suitable to guide cell growth.…”
Section: Introductionmentioning
confidence: 99%