“…Several plasma sources have been explored, including the microwave induced plasma(MIP) [21][22][23], the capacitively coupled plasma (CCP) [24], the inductively coupled plasma(ICP) [25], the glow discharge(GD) [26], and the dielectric barrier discharge(DBD) [27,28]. Microplasmas have many advantages: small size, low gas and power consumption, and the relatively low manufacturing cost.…”