Digitally tunable holographic lithography using a spatial light modulator as a programmable phase mask

Lutkenhaus, Jeff; George, David; Moazzezi, Mojtaba; Philipose, Usha; Lin, Yuankun

doi:10.1364/oe.21.026227

Cited by 33 publications

(40 citation statements)

References 29 publications

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“…1(b) were reduced by 75% relative to others. The interference pattern formed by Beams 1, 3, 4, and 5 is sensitive to the phase change of Beam 4 [20]. Thus, such a phase pattern in Fig.…”

Section: Introductionmentioning

confidence: 97%

“…The phase of Diffracted Beam 1 is determined by the averaged gray levels of kite-type four-side polygons formed by white lines in Fig. 1(b) [20]. The same rule can be applied to other diffracted beams [20].…”

Section: Introductionmentioning

confidence: 99%

“…1(b) [20]. The same rule can be applied to other diffracted beams [20]. A diffraction pattern will be formed at the Fourier plane (the focal plane of the first lens), as shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Registering functional defects into periodic holographic structures

et al. 2015

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In this paper, we present two methods for registering desired defect lattices within background periodic lattices through spatial light-modulator-based holographic lithography. In the first method, the diffraction efficiency from the engineered phase pattern was used to locally modify the fill fraction of polymerized materials in holographic structures, and, at the same time, we achieved the lattice matching between modified and background regions. In the second method, we registered spatially variant lattices for a 90 deg bend within the background periodic lattices through two steps of phase engineering of the laser beam.

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“…1(b) were reduced by 75% relative to others. The interference pattern formed by Beams 1, 3, 4, and 5 is sensitive to the phase change of Beam 4 [20]. Thus, such a phase pattern in Fig.…”

Section: Introductionmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Registering functional defects into periodic holographic structures

et al. 2015

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“…Although the fabrication deforming a planar microlens array is flexible, the complex process and harsh control condition may restrict its development. The spatial light modulation (SLM) based lithography, [13][14][15] such as using digital micromirror device (DMD), can provide a fast and convenient strategy for forming microelements. However, up to now only the fabrication of planar microelements has been reported.…”

Section: Introductionmentioning

confidence: 99%

Fast fabrication of curved microlens array using DMD-based lithography

et al. 2016

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Curved microlens array is the core element of the biologically inspired artificial compound eye. Many existing fabrication processes remain expensive and complicated, which limits a broad range of application of the artificial compound eye. In this paper, we report a fast fabrication method for curved microlens array by using DMD-based maskless lithography. When a three-dimensional (3D) target curved profile is projected into a two-dimensional (2D) mask, arbitrary curved microlens array can be flexibly and efficiently obtained by utilizing DMD-based lithography. In order to verify the feasibility of this method, a curved PDMS microlens array with 90 micro lenslets has been fabricated. The physical and optical characteristics of the fabricated microlens array suggest that this method is potentially suitable for applications in artificial compound eye.

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“…27 Setups incorporating spatial light modulators present new opportunities to fabricate many of the same structures as traditional holographic lithography setups by generating the appropriate intensity profiles using computer generated holograms. [28][29][30][31][32][33][34][35][36][37][38]41 Computer generated holograms on phase-only SLMs have proven effective in generating multi-beam interferences, which are capable of fabricating periodic, [29][30][31][32][33] quasi-periodic structures, 28 and chiral photonic crystals. 31 By incorporating higher Fourier order into the phase pattern in conjunction with an amplitude SLM, multiperiodic lattices can be formed.…”

Section: Introductionmentioning

confidence: 99%

Spatial light modulator based holographic fabrication of 3D spatially varying photonic crystal templates

et al. 2015

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In this work, we present holographic fabrication of spatially varying photonic crystal templates of gradient index structures in photosensitized polymer using the interference of multiple beams with specified phases generated by an engineered grayscale phase patterns displayed on a phase only spatial light modulator (SLM) in conjunction with a 4f imaging system. Simple spatially varying 3D structures are fabricated by the interference of four 1 st order beams with desired phases plus a central 0 th order beam generated by pixel-by-pixel assignment of the gray levels of cells and supercells within the phase pattern displayed on the SLM. Additionally, a low order simple gradient or vortex phase can be added to a multi-beam-generating phase pattern to also create an angularly varying 3D structure. We also demonstrate 2D and 3D spatially variant wave fields that can be used to fabricate photonic crystal templates in photoresist with variation in lattice orientation and spacing using interference of modified beams with specified phases produced by an engineered phase pattern displayed on a SLM. With control of the phases of interfering beams using an SLM, holographic fabrication of spatially varying photonic lattices becomes possible.

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Digitally tunable holographic lithography using a spatial light modulator as a programmable phase mask

Cited by 33 publications

References 29 publications

Registering functional defects into periodic holographic structures

Registering functional defects into periodic holographic structures

Fast fabrication of curved microlens array using DMD-based lithography

Spatial light modulator based holographic fabrication of 3D spatially varying photonic crystal templates

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