Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm

Hariharan, P.; Oreb, Bozenko F.; Eiju, Tomoaki

doi:10.1364/ao.26.002504

Cited by 859 publications

(402 citation statements)

References 7 publications

Supporting

Mentioning

395

Contrasting

Unclassified

Order By: Relevance

“…In the reference arm, a piezo-electrically driven mirror is mounted to change the optical path lengths. The phase distribution of the wave field is obtained by measuring the interference fringes at different mirror positions and employing a classical 5-frame algorithm, which is termed SchwiderHariharan method 6,7 . In this scheme, 5 frames of the intensity pattern are recorded, each frame being shifted in phase by adding an additional phase of Ȝ / 4 by moving the mirror in the reference arm.…”

Section: Methodsmentioning

confidence: 99%

Measuring amplitude and phase of light emerging from microstructures with HRIM

2011

View full text Add to dashboard Cite

Ultra high-resolution measurements of amplitude and phase fields emerging from fine period amplitude gratings are presented and discussed. In the axial direction periodically repeated features are found, whose origins are the Talbot effect within the Fresnel diffraction regime. The phase field recording leads to a very precise measurement of the localization of the Talbot planes and precisions below 100 nm are demonstrated. The concept of immersion interference microscopy is demonstrated. By accessing the back focal plane of the observation system filtering of diffraction orders provides specific Talbot images and allows to intuitively understand the role of diffraction orders for Talbot effect.

show abstract

Section: Methodsmentioning

confidence: 99%

Measuring amplitude and phase of light emerging from microstructures with HRIM

2011

View full text Add to dashboard Cite

show abstract

“…Surface height variations in the DM create interference fringes when the reference and measurement beams are recombined, producing an interferogram that is captured and digitized using a CCD camera (Cohu 6612-1000) and a framegrabber card (Matrox Meteor-II). The surface profile of the DM is reconstructed using five interferograms collected at four distinct phase shifts (0, /2, , 3 /2) using Hariharan's algorithm [16]. The use of a similar instrument for dynamic characterization of millimeter-sized MEMS devices was first described by Hart et al [17].…”

Section: Phase-shifting Interferometermentioning

confidence: 99%

Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry

Horsley

Park

Laut

et al. 2007

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

The static and dynamic characteristics of a bimorph deformable mirror (DM) for use in an adaptive optics system are described. The DM is a 35-actuator device composed of two disks of lead magnesium niobate (PMN), an electrostrictive ceramic that produces a mechanical strain in response to an imposed electric field. A custom stroboscopic phase-shifting interferometer was developed to measure the deformation of the mirror in response to applied voltage. The ability of the mirror to replicate optical aberrations described by the Zernike polynomials was tested as a measure of the mirror's static performance. The natural frequencies of the DM were measured up to 20 kHz using both stroboscopic interferometry as well as a commercial laser Doppler vibrometer (LDV). Interferometric measurements of the DM surface profile were analyzed by fitting the surface with mode-shapes predicted using classical plate theory for an elastically supported disk. The measured natural frequencies were found to be in good agreement with the predictions of the theoretical model.

show abstract

“…In the reference arm, a piezo-electrically driven mirror is mounted to change the optical path length. The phase distribution in a single plane of the wave field is obtained by measuring the interference fringes at different mirror positions and employing the wellknown 5-frame algorithm, which is called Schwider-Hariharan method 21,22 . Five frames of the intensity pattern, from which the 2D phase information can be directly retrieved, are recorded with each frame being shifted by adding an optical path of λ/4 or 0.5π.…”

Section: Methodsmentioning

confidence: 99%

Advanced optical characterization of micro solid immersion lens

et al. 2012

View full text Add to dashboard Cite

We report on the advanced optical characterizations of microfabricated solid immersion lenses with 2-µm diameter, operating at λ = 642 nm. The main feature, the spot size reduction, has been investigated by applying a focused Gaussian beam of NA = 0.9. Particular illuminating beams, e.g., Bessel-Gauss beams of the zeroth and the first order, a doughnutshape beam and its decompositions, i.e. two-half-lobes beams, have also been used to influence the shape of the immersed focal spot. Detailed optical characterizations have been conducted by measuring the amplitude and phase distributions with a high-resolution interference microscope (HRIM) in volume around the focal spot. The immersion effect of the SiO 2 solid immersion lens leads to a spot-size reduction of approximately 1.5 which agrees well with theory. Particularly shaped incident beams exhibit a comparable size reduction of the immersed spots. Such structured focal spots are of significant interest in optical trapping, lithography, and optical data storage systems.

show abstract

Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm

Cited by 859 publications

References 7 publications

Measuring amplitude and phase of light emerging from microstructures with HRIM

Measuring amplitude and phase of light emerging from microstructures with HRIM

Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry

Advanced optical characterization of micro solid immersion lens

Contact Info

Product

Resources

About