Diffuse scattering due to stochastic disturbances of 1D-gratings on the example of line edge roughness

Heusinger, Martin; Michaelis, Dirk; Flügel-Paul, Thomas; Zeitner, Uwe D.

doi:10.1364/oe.26.028104

Cited by 8 publications

(2 citation statements)

References 28 publications

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“…Riskila et al [7] researched surface roughness on flat vacuum boundaries, finding that rougher components transmit more scattering intensity. Heusinger et al [8] proposed a method for calculating two-dimensional scattering of arbitrarily polarized light based on grating geometric structures, similar to the scattering theory of surface roughness. Wang et al [9] analyzed the mechanism of roughness scattering, focusing on how sidewall roughness-induced changes in the effective refractive index mode affect scattering losses in slit waveguides.…”

Section: Current State Of Research On Surface Roughnessmentioning

confidence: 99%

Comprehensive Evaluation Study of Innovative Measurement Techniques in Surface Roughness within Manufacturing Processes

Guo,

Li,

Wang

2024

J. Phys.: Conf. Ser.

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With the advancement of modern technology, numerous advanced methods for measuring surface roughness have emerged. These are categorized into contact and non-contact methods, such as optical, ultrasonic, and machine vision measurements. By researching and integrating various characteristics, including cutting parameters, vibration, and force signals, with workpiece texture images, a comprehensive model for predicting surface roughness is formed. These novel multidimensional feature prediction equations significantly enhance practicality and accuracy in assessing the surface quality of machined workpieces, marking a clear advancement over traditional measurement techniques.

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Section: Current State Of Research On Surface Roughnessmentioning

confidence: 99%

Comprehensive Evaluation Study of Innovative Measurement Techniques in Surface Roughness within Manufacturing Processes

Guo,

Li,

Wang

2024

J. Phys.: Conf. Ser.

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“…In the presence of roughness, light is scattered out of the position of the diffraction orders and several scattering phenomena can be observed 10,12,32,33 . The total intensity of the out-scattered light depends on the amplitude of the roughness.…”

Section: Impact Of Imperfections On the Scattering Patternmentioning

confidence: 99%

Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings

Herrero¹,

Pflüger²,

Probst³

et al. 2019

Opt. Express

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Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the performance. Grazing-incidence small-angle X-ray scattering is a characterization method that is sensitive to three-dimensional structures and their imperfections. To quantify line-edge roughness, a Debye-Waller factor (DWF), which is derived for binary gratings, is usually used. In this work, we systematically analyze the effect of roughness on the diffracted intensities. Two different limits to applying the DWF are found depending on whether or not the roughness is normally distributed.

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Synthesis and characterization of sprayed LiNiVO4 thin films: New application areas

et al. 2021

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Diffuse scattering due to stochastic disturbances of 1D-gratings on the example of line edge roughness

Cited by 8 publications

References 28 publications

Comprehensive Evaluation Study of Innovative Measurement Techniques in Surface Roughness within Manufacturing Processes

Comprehensive Evaluation Study of Innovative Measurement Techniques in Surface Roughness within Manufacturing Processes

Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings

Synthesis and characterization of sprayed LiNiVO4 thin films: New application areas

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