Abstract:Abstract. The vibrational state of an array of microcantilevers piezoelectrically excited has been characterized analyzing the far-field diffraction pattern produced by the structure. A model based on the definition of a complex reflectivity window has been developed to fully understand the dynamic of the elements and the diffraction pattern produced by them. This model is parameterized by the driving voltage of the excitation, the vibration mode, and the phase correlation among cantilevers. An experimental se… Show more
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