Diffraction limited X-ray optics: technology, metrology, applications

Abstract

Progress in the fabrication technology of normal incidence multilayer interference mirrors permits the traditional optical methods of microscopy, astronomy, and lithography to be transferred to the vacuum ultraviolet (VUV, wavelength: 10–200 nm) and the long-wavelength part of the soft X-ray (SXR, wavelength: 2–10 nm) ranges. Due to the short wavelength and properties of interaction with the substance, the radiation of these ranges provides unique opportunities in nanophysics, nanotechnology, and nanodiagnostics of matter. To use the potential of a short wavelength in full, diffraction-limited optical elements are required. Compared to traditional optical elements, their accuracy must be at least two orders of magnitude higher. The article provides an analysis of the real capabilities of traditional methods of making and studying precision optical elements and reports on the methods of fabrication and characterization of diffraction-limited optics for the VUV and SXR ranges developed at IPM RAS. Examples of the use of these optical elements for the tasks of extraterrestrial astronomy, X-ray microscopy, and lithography are given.

Soft X-ray Microscopy in Cell Biology: Current Status, Contributions and Prospects

“…An alternative to the optical design with zone plates, which has become the industry standard in cryo- SXT, can be the use of normal-incidence mirror lenses optimized for the wavelengths of the water transparency window [ 69 ]. Calculations show that such a microscope, with a completely achievable numerical aperture of 0.3 [ 70 ] (vs. ~0.05–0.06 for the zone plates) at a wavelength of 3.37 nm will allow for a lateral resolution of ~ 5 nm, which is an order of magnitude better than the standard achievable 40–70 nm in cryo-SXT and lies in the range previously accessible only by EM. This tool is currently a laboratory prototype and has not yet reached its design parameters; however, the functionality of all elements of the system has been demonstrated.…”

Wavefront lens corrector for studying flat surfaces

“…Studying the wavefront aberrations was performed using PDI based on single-mode optical fiber with subwave output aperture at horizontal interferometer stand described in [13]. Picture of the stand with designations of the main elements of the measuring scheme is presented in Fig.…”

Линзовый Корректор Волнового Фронта Для Изучения Плоских Поверхностей

“…Изучение аберраций волнового фронта проводилось с помощью ИДВС на основе одномодового оптического волокна с субволновой выходной апертурой на стенде горизонтального интерферометра, описанном в [13]. Фотография стенда с обозначениями основных элементов схемы измерений приведена на рис.…”