Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

Muttikulangara, Sanathanan S.; Barański, Maciej; Rehman, Shakil; Hu, Liangxing; Miao, Jianmin

doi:10.1109/memsys.2018.8346650

Cited by 5 publications

(5 citation statements)

References 7 publications

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“…Thus, the propulsion direction of the micro-craft can be steered and controlled by external magnetic field in future work. Pt acts as a chemical catalyst to prompt the decomposition of H 2 O 2 into H 2 O and O 2 bubbles. − Micro-crafts were fabricated using the mature MEMS technology developed in Micromachines Lab, School of Mechanical and Aerospace Engineering at Nanyang Technological University, Singapore. ,,, …”

Section: Methodsmentioning

confidence: 99%

“…Pt acts as a chemical catalyst to prompt the decomposition of H2O2 into H2O and O2 bubbles [11][12][13][14]. Micro-crafts were fabricated using the mature MEMS technology developed in Micromachines Lab, School of Mechanical and Aerospace Engineering at Nanyang Technological University, Singapore [15][16][17][18].…”

Section: Self-steerable Propulsion Mechanismmentioning

confidence: 99%

“…11−14 Micro-crafts were fabricated using the mature MEMS technology developed in Micromachines Lab, School of Mechanical and Aerospace Engineering at Nanyang Technological University, Singapore. 15,16,17,18 The micro-craft is fabricated by the LbL deposition method based on the MEMS technology (see Supporting Information, Figure S2). solution were approximated to be 20 μm (Figure 4a).…”

Section: ■ Experimental Sectionmentioning

confidence: 99%

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Self-Steerable Propulsion of Disk-Like Micro-Craft with Dual Off-Center Nanoengines

Tao

Lim

et al. 2018

ACS Appl. Energy Mater.

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This paper reports a novel disk-like micro-craft with dual off-center nozzle nanoengines, consisting of three different metals: gold, nickel, and platinum. A bubble propulsion mechanism originating from momentum change induced by the detachment of oxygen bubbles is proposed to elaborate the self-steerable propulsion of the disk-like gold-nickel-platinum micro-craft. The asproposed micro-craft is fabricated by a layer-by-layer deposition method based on the microelectro-mechanical systems technology. Herein, the self-steerable propulsion of the fabricated micro-craft dispersed in deionized water with different hydrogen peroxide concentrations is characterized. As a consequence, the speed of the micro-craft is increased with the increment of hydrogen peroxide concentration. In addition, the micro-craft can always move forward linearly.

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Section: Methodsmentioning

confidence: 99%

Section: Self-steerable Propulsion Mechanismmentioning

confidence: 99%

Section: ■ Experimental Sectionmentioning

confidence: 99%

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Self-Steerable Propulsion of Disk-Like Micro-Craft with Dual Off-Center Nanoengines

Tao

Lim

et al. 2018

ACS Appl. Energy Mater.

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“…The DG is rotated by 90° compared to the previous scheme of Figure 2, with its lines now being parallel to the WFE plane. The arrangement of the DG now changes the direction of dispersion, leading to the spectral separation of the wavelengths along the y axis [23]. This also allows to steer the input beam at the xz plane without affecting the operational incident angle of the DG that is on the yz plane.…”

Section: Hybrid Wss Enabling Beamsteering Functionality Of the Frontendmentioning

confidence: 99%

Optical Design of a Wavelength Selective Switch Utilizing a Waveguide Frontend with Beamsteering Capability

Patsamanis,

Ketzaki,

Chatzitheocharis

et al. 2024

Preprint

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Wavelength selective switches (WSSs) are essential elements for wavelength division multiplexing (WDM) optical networks, as they offer cost-effective, high port-count and flexible spectral channel switching. This work proposes a new hybrid WSS architecture that leverages the beam shaping and steering features of uniform silicon nitride (SiN) based end-fire optical phased arrays (OPAs). By introducing beamforming to a WSS system, the spectral channels on the liquid crystal on silicon (LCoS) panel can be tailored and arranged properly, depending on the optical configuration, using the beam control capabilities of OPAs. Combining 3D-FDTD and ray tracing simulations, the study shows that by reducing the input beam dimensions with proper sizing of the OPAs, the WSS design with the null-steering OPAs layout and 4×No switch size features increased spectral resolution. This extensive beamforming study on the steering-enabled layout reveals the acquirement of an even higher input channel number, achieving up to the 8×No WSS scheme with flexible channel routing on the LCoS panel. Such implementation of beamsteerers can unlock an extra degree of freedom for the switching capabilities of hybrid WSS devices. The results show great promise for the introduction of OPAs in WSS systems and provide valuable insight for the design of future wireless communication links and WDM systems.

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“…One such application is the integration of optics with the electrostatic micromotors. 1–5 The application of electrostatic micromotors is also extended to gyroscope, 6 optical endoscope 7 and diamagnetic levitation. 8 Recently, a triboelectric micromotor was demonstrated by coupling a triboelectric nanogenerator with an electrostatic micromotor, which is capable of rotating without an external power supply and greatly improves the usability of the electrostatic micromotor as MOEMS.…”

Section: Introductionmentioning

confidence: 99%

Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA

Shukla

Beera

Dubey

et al. 2021

Journal of Micromanufacturing

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In the present work, a micro-electro-mechanical system (MEMS)-based electrostatic micromotor is designed and fabricated. Finite element analysis is done and various parameters affecting the torque are studied. Maximum torque is achieved at 120° phase angle. The effect of change in voltage, micromotor height and frequency is analysed and discussed. UV-SLIGA, a microfabrication technique, is used for the fabrication of electrostatic micromotor of height 30µm and higher. UV lithography is conducted by both positive AZ P4620 and negative (SU-8 10 and SU-8 2150) photoresists. Copper (Cu) is used as a sacrificial layer to release the rotor (the movable part) of the electrostatic micromotor. Electroformed nickel (Ni) is used for making stator, rotor and axle, whereas chromium (Cr) is used as a seed layer. The micromotor is fabricated with a stator-rotor pole having configuration ratio of 3:2. The gap between the rotor and axle is 20 µm. Wet chemical etching is used to etch the deposited metal layers (Cr, Ni and Cu). Challenges such as the adhesion between the photoresist mould and substrate, cracks, seepage and misalignment are faced during the microfabrication. These challenges are overcome by optimizing the various parameters. The fabrication of electrostatic micromotor is done successfully and the results are discussed in the article.

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Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

Cited by 5 publications

References 7 publications

Self-Steerable Propulsion of Disk-Like Micro-Craft with Dual Off-Center Nanoengines

Self-Steerable Propulsion of Disk-Like Micro-Craft with Dual Off-Center Nanoengines

Optical Design of a Wavelength Selective Switch Utilizing a Waveguide Frontend with Beamsteering Capability

Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA

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