Abstract.A grand challenge in soft x-ray spectroscopy is to drive the resolving power of monochromators and spectrometers from the 10 4 achieved routinely today to well above 10 5 . This need is driven mainly by the requirements of a new technique that is set to have enormous impact in condensed matter physics, Resonant Inelastic X-ray Scattering (RIXS). Unlike x-ray absorption spectroscopy, RIXS is not limited by an energy resolution dictated by the core hole lifetime in the excitation process. Using much higher resolving power than used for normal x-ray absorption spectroscopy enables access to the energy scale of soft excitations in matter. These excitations such as magnons and phonons drive the collective phenomena seen in correlated electronic materials such as high temperature superconductors. RIXS opens a new path to study these excitations at a level of detail not formerly possible. However, as the process involves resonant excitation at an energy of around 1 keV, and the energy scale of the excitations one would like to see are at the meV level, to fully utilize the technique requires the development of monochromators and spectrometers with one to two orders of magnitude higher energy resolution than has been conventionally possible. Here we investigate the use and optimization of high-order dense multilayer gratings as the dispersive element in ultra-high resolution x-ray spectroscopy. Traditionally 1 st order gratings are used in the soft x-ray region, but we show that as in the optical domain, one can work in very high spectral orders and thus dramatically improve resolution without significant loss in efficiency. 8. C. Rife, W. R. Hunter, T. W. Barbie, Jr., and R. G. Gruddace, "Multilayer-coated blazed grating performance in the soft x-ray region," Appl. Opt. 28, 2984Opt. 28, -2986Opt. 28, (1989 9. M. Neviere, "Multilayer coated gratings for x-ray diffraction: differential theory", J. Opt. Soc. 37. D. Attwood, Soft x-rays and extreme ultraviolet radiation, Cambrige university press, 1999, 469p.
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