2011
DOI: 10.1364/ao.50.001364
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Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands

Abstract: We report on measurements of the diffraction efficiency of 200-nm-period freestanding blazed transmission gratings for wavelengths in the 0.96 to 19.4 nm range. These critical-angle transmission (CAT) gratings achieve highly efficient blazing over a broad band via total external reflection off the sidewalls of smooth, tens of nanometer thin ultrahigh aspect-ratio silicon grating bars and thus combine the advantages of blazed x-ray reflection gratings with those of more conventional x-ray transmission gratings.… Show more

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Cited by 36 publications
(31 citation statements)
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“…At present, grating efficiencies near 1 nm are too low for CPA to increase the peak power, but advances in blazed gratings may make CPA schemes more effective in the future (see, e.g., [18]). …”
Section: -3mentioning
confidence: 99%
“…At present, grating efficiencies near 1 nm are too low for CPA to increase the peak power, but advances in blazed gratings may make CPA schemes more effective in the future (see, e.g., [18]). …”
Section: -3mentioning
confidence: 99%
“…MLs allows operation at larger Bragg angles, θ, which reduces the asymmetry for a fixed blaze angle (see formulas 6,8,9), and hence mitigates absorption and refraction. The optimization should be performed for each particular case in terms of requirements and constraints of a whole spectrometer design.…”
Section: Absolute Efficiency Of Dense Mbgs: Multilayer Optimizationmentioning
confidence: 99%
“…CAT gratings have demonstrated good efficiency to above the 10 th order for a 200 nm period grating, in the soft x-ray energy range [5,6]. The fragile nature of the transmission grating however precludes its use as a monochromatizing element for synchrotron x-ray source applications, due to the 10's of Watts of power the element must absorb due to the quasi broad -band nature of the source.…”
Section: Introductionmentioning
confidence: 99%
“…They can be described as blazed transmission gratings and combine the advantages of pastgeneration transmission and blazed reflection gratings. 16,[18][19][20] The basic structure of a CAT grating is shown in Fig. 1 in cross section.…”
Section: Cat Grating Principlementioning
confidence: 99%
“…X-ray gratings come in two main flavors: Reflection 4,11,14,15 and transmission gratings. 3,10,16 Transmission gratings are very thin and offer a mass advantage, especially for large aperture x-ray telescopes. They are also relatively tolerant towards…”
Section: Introductionmentioning
confidence: 99%