Diffraction analysis of digital micromirror device in maskless photolithography system

Xiong, Zheng; Lü, Hua; Tan, Xiao; Lu, Zhenwu; Li, Cuixia; Song, Liwei; Wang, Zhi

doi:10.1117/1.jmm.13.4.043016

Cited by 17 publications

(6 citation statements)

References 9 publications

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“…In this work, we report the design and printing of customized DOEs on synthetic PEGDA hydrogel using digital photopatterning technology, which combines digital projection photolithography [ 32–39 ] with computer‐generated holography. [ 40–42 ] In this work, simulated computer‐generated holography (SCGH) was used to generate customized digital patterns based on DOE designs, and these digital patterns were uploaded onto a digital micromirror device (DMD) to generate virtual masks (instead of conventional physical masks) to enable rapid printing of hDOEs.…”

Section: Introductionmentioning

confidence: 99%

Hydrogel‐Based Diffractive Optical Elements (hDOEs) Using Rapid Digital Photopatterning

Xiong

Kunwar

Soman

2020

Advanced Optical Materials

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Inspired by natural systems, microstructural modification has been exploited as a promising strategy to introduce new optical properties to conventional materials such as manipulation of light based on diffraction or diffraction optical elements (DOEs). [15-18] These DOEs have become increasingly important in biomedical applications ranging from imaging to diagnostics to sensing. [19-22] In the past decades, the DOEs are mostly made of conventional optical materials such as glass, semiconductor, and metals. Nonetheless, the inherent lack of mechanical flexibility and biocompatibility of these materials render their use difficult for in vitro and in vivo biophotonics applications. Hydrogels, due to their unique optical transparency and biocompatibility, provide a good alternative to conventional optical materials. Several natural and synthetic hydrogels, such as, silk, chitin, chitosan, bovine serum albumin, polyacrylamide, polyacrylic acid, and PEGDA have been used to make hydrogel based DOEs or hDOEs with optical performance comparable to conventional materials. [22-28] However, competing challenges such as high resolution, ease/cost of manufacturing, and customization of design based on target applications, prevent its widespread use in the field. At present, hDOEs such as diffraction grating, holographic components, and Fresnel zone plates (FZP) are fabricated using indirect and direct methods. [7,22,26,29-31] Indirect methods, such as mask-based photolithography, inverse opals, soft lithography, and nanoimprinting, require use of expensive physical masks, and time-consuming iterative optimization to fabricate hDOEs. On the other hand, direct methods such as electron beam lithography, direct laser writing, and multibeam interference lithography do not require physical mask to fabricate high-resolution hDOEs, however challenges with scalability and long processing/fabrication times remain. The aforementioned challenges have to be addressed to meet the high demand for hDOEs in the field; this would require an ability to rapidly design and manufacture customized hDOEs based on the needs of target applications. In this work, we report the design and printing of customized DOEs on synthetic PEGDA hydrogel using digital photopatterning technology, which combines digital projection photolithography [32-39] with computer-generated holography. [40-42] In this work, simulated computer-generated holography (SCGH) was used to generate customized digital patterns based on DOE Hydrogels, due to their optical transparency and biocompatibility, have emerged as an excellent alternative to conventional optical materials for biomedical applications. Advances in microfabrication techniques have helped convert conventional hydrogels into optically functional materials such as hydrogel-based diffraction optical elements (hDOEs). However, key challenges related to device customization and ease/speed of fabrication need to be addressed to enable widespread utility and acceptance of hDOEs in the field. Here, rapid printing of customiz...

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Section: Introductionmentioning

confidence: 99%

Hydrogel‐Based Diffractive Optical Elements (hDOEs) Using Rapid Digital Photopatterning

Xiong

Kunwar

Soman

2020

Advanced Optical Materials

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“…11 Printing complex 3D structures is possible with additive methods based on extrusion-based fused deposition modeling and light-based digital projection lithography, but the resolution of these methods is typically limited to *50 lm or lower. [12][13][14] Multiphoton polymerization (MPP) is capable of printing 3D structures using soft materials with nano-to-micrometer resolution, yet low scalability makes this process unfeasible for making centimeter-scale constructs. 15,16 Newer advancement in additive manufacturing techniques such as continuous liquid interphase printing (CLIP) enables high-resolution printing in a quick and continuous manner.…”

Section: Introductionmentioning

confidence: 99%

Oxygen-Permeable Films for Continuous Additive, Subtractive, and Hybrid Additive/Subtractive Manufacturing

Kunwar

Xiong

McLoughlin

et al. 2020

3D Printing and Additive Manufacturing

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In the past 5 years, oxygen-permeable films have been widely used for continuous additive manufacturing. These films create a polymerization inhibition zone that facilitates continuous printing in the additive mode of fabrication. Typically, oxygen-permeable films made out of Teflon are currently used. These films are expensive and are not commonly available. Hence, this research work investigates the feasibility of using commonly available low-cost oxygen-permeable films made from polydimethylsiloxane (PDMS) and polyurethane for continuous additive manufacturing. We also characterize the ablation depth range that can be achieved using these films and the potential use for subtractive ablation-based manufacturing as well as hybrid additive/ subtractive manufacturing. Results demonstrate that the PDMS films (600 lm thick) can be used for both additive and subtractive modes, whereas spin-coated PDMS thin film (40 lm thick) on glass coverslip and breathe-easy polyurethane film (20 lm thick) laminated on glass coverslip are suitable only for additive mode of fabrication. The latter two films are oxygen impermeable, however, they retain oxygen, which is capable of creating dead zone and thereby facilitates continuous printing. We anticipate that this work will help researchers to choose the appropriate oxygen-permeable film for continuous additive, subtractive, and hybrid additive/ subtractive manufacturing of complex three-dimensional structures for a range of applications.

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“…However, the high cost, time consuming nature, and lack of flexibility of mask manufacturing have become the bottlenecks of lithography [ 1 ]. In recent years, electron beam [ 2 ], laser direct writing [ 3 ], laser interference lithography [ 4 ], focused ion beam [ 5 ], and DMD projection lithography [ 6 ] are employed to solve this problem. These lithographic methods are mostly single-spot exposure, and even the area array multi-point projection exposure of DMD has a small exposure area at high resolution.…”

Section: Introductionmentioning

confidence: 99%

Path Planning of Pattern Transfer Based on Dual-Operator and a Dual-Population Ant Colony Algorithm for Digital Mask Projection Lithography

Wang

Han

et al. 2020

Entropy

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In the process of digital micromirror device (DMD) digital mask projection lithography, the lithography efficiency will be enhanced greatly by path planning of pattern transfer. This paper proposes a new dual operator and dual population ant colony (DODPACO) algorithm. Firstly, load operators and feedback operators are used to update the local and global pheromones in the white ant colony, and the feedback operator is used in the yellow ant colony. The concept of information entropy is used to regulate the number of yellow and white ant colonies adaptively. Secondly, take eight groups of large-scale data in TSPLIB as examples to compare with two classical ACO and six improved ACO algorithms; the results show that the DODPACO algorithm is superior in solving large-scale events in terms of solution quality and convergence speed. Thirdly, take PCB production as an example to verify the time saved after path planning; the DODPACO algorithm is used for path planning, which saves 34.3% of time compared with no path planning, and is about 1% shorter than the suboptimal algorithm. The DODPACO algorithm is applicable to the path planning of pattern transfer in DMD digital mask projection lithography and other digital mask lithography.

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Diffraction analysis of digital micromirror device in maskless photolithography system

Cited by 17 publications

References 9 publications

Hydrogel‐Based Diffractive Optical Elements (hDOEs) Using Rapid Digital Photopatterning

Hydrogel‐Based Diffractive Optical Elements (hDOEs) Using Rapid Digital Photopatterning

Oxygen-Permeable Films for Continuous Additive, Subtractive, and Hybrid Additive/Subtractive Manufacturing

Path Planning of Pattern Transfer Based on Dual-Operator and a Dual-Population Ant Colony Algorithm for Digital Mask Projection Lithography

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