The
emerging demand for device miniaturization and integration
prompts the patterning technique of micronano-cross-scale structures
as an urgent desire. Lithography, as a sufficient patterning technique,
has been playing an important role in achieving functional micronanoscale
structures for decades. As a promising alternative, we have proposed
and demonstrated the maskless optical projection nanolithography (MLOP-NL)
technique for efficient cross-scale patterning. A minimum feature
size of 32 nm, which is λ/12 super resolution breaking the optical
diffraction limit, has been achieved by a single exposure. Furthermore,
multiscale two-dimensional micronano-hybrid structures with the size
over hundreds of micrometers and the precision at tens of nanometers
have been fabricated by simply controlling the exposure conditions.
The proposed MLOP-NL technique provides a powerful tool for achieving
cross-scale patterning with both large-scale and precise configuration
with high efficiency, which can be potentially used in the fabrication
of multiscale integrated microsystems.