Differing morphologies of textured diamond films with electrical properties made with microwave plasma chemical vapor deposition

Lai, Wen Chi; Wu, Yu-Shiang; Chang, Hou-Cheng; Lee, Yuan-Haun

doi:10.1016/j.apsusc.2010.09.006

Cited by 7 publications

(2 citation statements)

References 29 publications

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“…Usually the formation of a cauliflower structure is related to the use of high CH 4 /H 2 ratio regardless of the type of deposition source. , This type of structure is reported to appear when using low-energy sources or a strong accelerating bias perturbing diamond growth . On the other hand, evidence of cauliflower structures in the first stages of microcrystalline diamond deposition has also been reported …”

Section: Experimental Results and Discussionmentioning

confidence: 99%

“…19 On the other hand, evidence of cauliflower structures in the first stages of microcrystalline diamond deposition has also been reported. 20 The few published studies on the influence of substrate temperature on diamonds growth indicate that low temperatures lead to the deposition of cauliflower morphology 21 at a given pressure. From the results presented in Figure 2, it is noted that, at 200 Torr, higher substrate temperatures promote the growth of larger and more regular diamond grains, up to a certain temperature, after which cauliflower growth reappears, possibly due to the consequent higher hydrogen desorption rate that increases defect density in the structure.…”

Section: ■ Experimental Results and Discussionmentioning

confidence: 99%

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Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

et al. 2014

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Plasma assisted CVD is now an established technique for the growth of a variety of dielectrics and semiconductors. The versatility of an in-house developed direct-current (dc) microplasma deposition system is demonstrated here for the growth of a wide range of carbon-based materials. Diamond, nanodiamond, nanocrystalline graphite, single-wall carbon nanotubes, and few-layer graphene have been deposited using the same dc microplasma deposition system using 0.5% CH4/H2 gas feed, but changing only the substrate temperature (in the range 500−1150 °C) and the total pressure (0.3−200 Torr). The different structures have been characterized by scanning electron microscopy and micro-Raman spectroscopy. The experimental data have been interpreted from a thermodynamic point of view by applying a nonequilibrium nondissipative model. Nonequilibrium phase diagrams are presented and compared to the experimental data to provide a wide-ranging interpretation scenario

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