2014
DOI: 10.1021/jp501440b
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Carbon Structures Grown by Direct Current Microplasma: Diamonds, Single-Wall Nanotubes, and Graphene

Abstract: Plasma assisted CVD is now an established technique for the growth of a variety of dielectrics and semiconductors. The versatility of an in-house developed direct-current (dc) microplasma deposition system is demonstrated here for the growth of a wide range of carbon-based materials. Diamond, nanodiamond, nanocrystalline graphite, single-wall carbon nanotubes, and few-layer graphene have been deposited using the same dc microplasma deposition system using 0.5% CH4/H2 gas feed, but changing only the substrate t… Show more

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Cited by 11 publications
(8 citation statements)
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“…In the microwave-activated plasma, the H 2 molecule could be converted to atomic hydrogen (H*). , The energetic H* atoms could displace carbon atoms in both graphite and diamond. Because the displacement energy of graphite is smaller than that of diamond, the reactive H* etches the graphite phase twenty times as fast as it etches diamond. Therefore, energetic H* atoms could work as an effective “chemical pump” to transform sp 2 -bonded carbon derived from CNWs to sp 3 -bonded carbon in the diamond. , First, the atomic H* could not only add to vacant surface carbon sites and passivate them but also abstract the hydrogen from the surface −C–H sites on the thin hydrogen-terminated diamond nanoplatelets and create reactive surface carbon sites . Because of the dynamic interaction between atomic H* and the surface, the reactive carbon sites would remain at a steady-state concentration .…”
Section: Discussionmentioning
confidence: 99%
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“…In the microwave-activated plasma, the H 2 molecule could be converted to atomic hydrogen (H*). , The energetic H* atoms could displace carbon atoms in both graphite and diamond. Because the displacement energy of graphite is smaller than that of diamond, the reactive H* etches the graphite phase twenty times as fast as it etches diamond. Therefore, energetic H* atoms could work as an effective “chemical pump” to transform sp 2 -bonded carbon derived from CNWs to sp 3 -bonded carbon in the diamond. , First, the atomic H* could not only add to vacant surface carbon sites and passivate them but also abstract the hydrogen from the surface −C–H sites on the thin hydrogen-terminated diamond nanoplatelets and create reactive surface carbon sites . Because of the dynamic interaction between atomic H* and the surface, the reactive carbon sites would remain at a steady-state concentration .…”
Section: Discussionmentioning
confidence: 99%
“…In the microwave-activated plasma, the H 2 molecule could be converted to atomic hydrogen (H*). 41,42 The energetic H* atoms could displace carbon atoms in both graphite and diamond. Because the displacement energy of graphite is smaller than that of diamond, 43 the reactive H* etches the graphite phase twenty times as fast as it etches diamond.…”
Section: Conversion Mechanism From the Hybrid C/dmentioning
confidence: 99%
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“…The generated gas discharges contain a high density of energetic electrons (>10 eV) that allows efficient material synthesis and processing. The previous reports also have demonstrated the feasibility of the microplasma-based process to produce metal ( Chiang & Sankaran, 2009 ; Chiang & Sankaran, 2008 ) and semiconductor nanoparticles ( Sankaran et al, 2005 ), oxides ( Mariotti, Bose & Ostrikov, 2009 ), and carbon nanostructures ( Ghezzi et al, 2014 ; Luo et al, 2016 ).…”
Section: Introductionmentioning
confidence: 96%
“…The Chemical Vapor Deposition (CVD) method [9] allows one to obtain diamonds by depositing carbon on an initial diamond plate in a hydrogen-methane-based plasma. There are three main ways to create plasma in CVD reactors-hot filament [10], direct current [11], and microwave-referred to as HF-, DC-, and M-CVD [12,13]. Generally, M-CVD demands less electric power to grow single-crystal diamonds, and we have therefore used it in this study as a low-rate energy benchmark for all CVD sub-methods.…”
Section: Introductionmentioning
confidence: 99%