2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2016
DOI: 10.1109/ipfa.2016.7564319
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Differential C-AFM system for semiconductor failure analysis

Xianxu Zheng
1
,
Yu Thi Han
2
,
Pei Hong Seah3
et al.
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The Application of Advanced Nano-Techniques in Failure Analysis for Different Failure Mechanism

Li1,
Lan
2
,
Liu3
et al. 2018
2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
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The Application of Advanced Nano-Techniques in Failure Analysis for Different Failure Mechanism

Li1,
Lan
2
,
Liu3
et al. 2018
2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
1
0
0
0
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Application of Confocal Microscopy Methods for Research and Non-destructive Examination of Semiconductor Structures and Integrated Circuits

Baluev
1
,
Ukolov
2
,
Pechenkin
3
et al. 2021
2021 IEEE 32nd International Conference on Microelectronics (MIEL)
3
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