Different Etch Pit Shapes Revealed by Molten KOH Etching on the (001) GaAs Surface and Their Dependence on the Burgers Vectors

Abstract

It is found that the etch pits revealed by molten KOH etching on the (001) GaAs surface have definitely different shapes depending on the Burgers vectors of the dislocations. The round hexagonal etch pit corresponds to a dislocation with Burgers vector of ½a〈101〉 inclined to the (001) plane, while the small round square etch pit corresponds to a dislocation with Burgers vector of ½a〈110〉 parallel to the (001) plane It is suggested that the larger hexagonal etch pit is associated with parallel pair of partial dislocations dissociated from perfect dislocations with Burgers vector of ½a〈110〉.

Dislocation studies by chemical etching on solution‐grown NaSbF4 and Na3Sb4F15 single crystals

“…He also developed an etch pit reagent and to analyze the effects of thermal stress on the shapes and sizes of etch pits in thallium arsenic selenide (TAS) crystals. Ishida and Kawano (1986) have reported that a molten KOH etching reveals a very clear etch pit on the (001) GaAs crystal. They have found that the etch pit shapes depend on the Burgers vectors of these dislocations.…”