Dielectrically Transduced Single-Ended to Differential MEMS Filter

Weinstein, Dana; Chandrahalim, Hengky; Cheow, Lih Feng; Bhave, Sunil A.

doi:10.1109/isscc.2006.1696170

Cited by 30 publications

(13 citation statements)

References 11 publications

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“…Recent research activities [9,10] have demonstrated that lower impedances (100 Ω to 10 kΩ) can be obtained via dielectric transduction by filling the actuation gap with solid high-k dielectrics. Although very promising, this technology is still unproven and fundamentally suffers from large intrinsic capacitances that mask the resonator response at high frequencies or complicate their interface with standard circuitry.…”

Section: Introductionmentioning

confidence: 99%

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

Piazza¹,

Stephanou²,

Pisano³

2007

Solid-State Electronics

121

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This paper reports on the design, fabrication and testing of novel one and two port piezoelectric higher order contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form banks of multi-frequency filters. The paper offers a comparison of one and two port resonant devices exhibiting frequencies approximately ranging from 200 to 800 MHz, quality factor of few thousands (1000-2500) and motional resistances ranging from 25 to 1000 Ω. Fundamental advantages and limitations of each solution are discussed. The reported experimental results focus on the response of a higher order one port resonator under different environmental conditions and a new class of two port contour resonators for narrow band filtering applications. Furthermore, an overview of novel frequency synthesis schemes that can be enabled by these contour-mode resonators is briefly presented. Keywords AbstractThis paper reports on the design, fabrication and testing of novel one and two port piezoelectric higher order contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form banks of multi-frequency filters. The paper offers a comparison of one and two port resonant devices exhibiting frequencies approximately ranging from 200 to 800 MHz, quality factor of few thousands (1,000-2,500) and motional resistances ranging from 25 to 1000 Ω. Fundamental advantages and limitations of each solution are discussed. The reported experimental results focus on the response of a higher order one port resonator under different environmental conditions and a new class of two port contour resonators for narrow band filtering applications. Furthermore, an overview of novel frequency synthesis schemes that can be enabled by these contour-mode resonators is briefly presented.

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Section: Introductionmentioning

confidence: 99%

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

Piazza¹,

Stephanou²,

Pisano³

2007

Solid-State Electronics

121

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“…To verify the dependence of extensional wine-glass frequency and Q on the design of its supports, a 460-MHz EWGR was purposely designed to have much shorter support beams than those dictated by the design formulations of Section III, with a length of 2.5 µm instead of the 4.46 µm governed by (10) and (11). Fig.…”

Section: Influence Of Support Beam Designmentioning

confidence: 99%

1.52-GHz micromechanical extensional wine-glass mode ring resonators

Xie

Lin

et al. 2008

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Abstract-Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-glass-mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2 GHz with a Q of 3,700, and 1.52 GHz with a Q of 2,800. The 1.2-GHz resonator exhibits a measured motional resistance of 1 MΩ with a dc-bias voltage of 20 V, which is 2.2 times lower than the resistance measured on radial contourmode disk counterparts at the same frequency. The use of larger rings offers a path toward even lower impedance, provided the spurious modes that become more troublesome as ring size increases can be properly suppressed using methods described herein. With spurious modes suppressed, the high-Q and low-impedance advantages, together with the multiple frequency on-chip integration advantages afforded by capacitively transduced mechanical resonators, make this device an attractive candidate for use in the front-end RF filtering and frequency generation functions needed by wireless communication devices.

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“…In addition to lower motional resistance, the use of solid dielectric-filled transducer gaps provides numerous other practical advantages over the air gap variety, since it (1) better stabilizes the resonator structure against shock and microphonics; (2) eliminates the possibility of particles getting into an electrode-to-resonator air gap, thereby removing a potential reliability issue; (3) greatly improves fabrication yield, by eliminating the difficult sacrificial release step needed for air gap devices; and (4) facilitates larger micromechanical circuits (e.g., bandpass filters comprised of interlinked resonators) by stabilizing constituent resonators as the circuits they comprise grow in complexity. Solid-dielectric capacitively transduced resonators employing a vertical-tolateral drive, and thereby not requiring a nano-scale lateral gap, have also been successfully demonstrated [28].…”

Section: B Thermal Stability Aging and Impedancementioning

confidence: 99%

Integrated Micromechanical Circuits for RF Front Ends

Nguyen¹

2006

2006 Proceedings of the 32nd European Solid-State Circuits Conference

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Abstract-Having now produced devices with sufficient Q, thermal stability, aging stability, and manufacturability, vibrating RF MEMS technology is already finding its way into next generation timing and wireless applications. At this juncture, the technology is now poised to take its next logical steps: higher levels of circuit complexity and integration. In particular, as vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth to rival that of integrated transistor circuits. After briefly reviewing the present state of vibrating RF MEMS device technology, this paper suggests the mechanical circuit element attributes most likely to insure a broad functional range for future integrated micromechanical circuits.

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Dielectrically Transduced Single-Ended to Differential MEMS Filter

Cited by 30 publications

References 11 publications

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

1.52-GHz micromechanical extensional wine-glass mode ring resonators

Integrated Micromechanical Circuits for RF Front Ends

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