2014
DOI: 10.1186/1556-276x-9-418
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Dielectric properties of porous silicon for use as a substrate for the on-chip integration of millimeter-wave devices in the frequency range 140 to 210 GHz

Abstract: In this work, the dielectric properties of porous Si for its use as a local substrate material for the integration on the Si wafer of millimeter-wave devices were investigated in the frequency range 140 to 210 GHz. Broadband electrical characterization of coplanar waveguide transmission lines (CPW TLines), formed on the porous Si layer, was used in this respect. It was shown that the dielectric parameters of porous Si (dielectric permittivity and loss tangent) in the above frequency range have values similar t… Show more

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Cited by 43 publications
(16 citation statements)
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“…For all the fabricated samples in this work, the Maxwell Garnett effective media model can be used to relate solid volume fraction with the material properties. [29b] – The Maxwell Garnett equation for nonmagnetic dielectric materials can be rearranged as neff21neff2+2nnormalmnormal21nnormalmnormal2+2=fwhere n eff is the effective index of the nanolattice material, n m is the index of the constituent material, and f is the solid volume fraction. Setting β=(neff21neff2+2)/(nnormalm21nnormalm2+2) as a unitless parameter normalized to the shell material, a simple linear relationship to volume fraction can be found, β=f.…”
Section: Resultsmentioning
confidence: 99%
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“…For all the fabricated samples in this work, the Maxwell Garnett effective media model can be used to relate solid volume fraction with the material properties. [29b] – The Maxwell Garnett equation for nonmagnetic dielectric materials can be rearranged as neff21neff2+2nnormalmnormal21nnormalmnormal2+2=fwhere n eff is the effective index of the nanolattice material, n m is the index of the constituent material, and f is the solid volume fraction. Setting β=(neff21neff2+2)/(nnormalm21nnormalm2+2) as a unitless parameter normalized to the shell material, a simple linear relationship to volume fraction can be found, β=f.…”
Section: Resultsmentioning
confidence: 99%
“…The data fits the analytical model well, indicating a linear relationship between the normalized indices and volume fraction. Note that Maxwell Garnett model is not suitable for binary mixtures with comparable volume fractions, therefore our analysis is limited to 40% solid volume fraction. This simple effective media model serves as a convenient guide for the index prediction and lattice geometry/material design.…”
Section: Resultsmentioning
confidence: 99%
“…Porous silicon structures have a wellar mechanical starkness, chemical retention and conformance with silicon cannulation hence has a spacious scope of potential employments like waveguides [11], biological testing equipment [12], chemical sensors [13], photo electronic solar batteries [14] and fuel cells [15]. In accordingly for proves the chemical and physical properties of anodizied porous silicon, several techniques have been developed among them rapid thermal oxidation [16], photo electrochemical etching [17], photochemical grown [18], stain etching [19] and electrochemical etching [11]. In our research, we have been studied the attributes of PSi samples prepared by electrochemical etching ECE such as morphological properties by using scanning electron microscope SEM, the structural properties like porosity and thickness have been measured by using the optical microscope and electrical properties have been investigated.…”
Section: Introductionmentioning
confidence: 99%
“…7). Copper is considered to be perfectly conductive (everything is reflected), quartz does not have frequency dispersion and the dielectric constant (ε = 3.8 for SiO 2 [75]) does not change with temperature. VO 2 is modeled in the framework of the Drude theory: the plasma frequency and the collision frequency of electrons depend on the temperature [76].…”
Section: K 340 K 345 Kmentioning
confidence: 99%
“…11). To explain the frequency dependence of the reflection coefficient, a theoretical model has been proposed within the framework of the Drude theory, since the optical characteristics of VO 2 undergo significant changes in PT [75]. Fig.10.…”
Section: Properties Of Vo 2 Films In Ehf Rangementioning
confidence: 99%