Dielectric and thermal characterization of fluorinated polyimides containing heterocyclic moieties

Abstract

A series of fluorinated polyinides and fluorinated polyimides containing heterocyclic moieties were prepared and investigated to determine their dielectric constants, dielectric constants as a function of relative humidity (RH) and thermal properties. Thle fluorinated polyimides containing heterocyclic moieties were prepared from diamines containing pyridine, pyridazine, oxadiazole or benzoxazole moieties. The properties of the fluorinated heterocyclic-containing polyimides were compared with those of fluorinated polyimides prepared from aromatic diamines. In most cases, the introduction of heterocyclic moieties caused an increase in dielectric constant, an increase in the dielectric constant as a function of relative humidity and a decrease in thermal stability compared with the polyimides prepared with aromatic diamines.

Polyimides 7: Synthesis, characterization, and properties of novel soluble semifluorinated poly(ether imide)s

“…Solubilization of polyimides have been targeted by several means, such as introduction of flexible linkages, 8,9 bulky substituents, 10,11 or bulky units in the polymer backbone, [12][13][14] incorporation noncoplanar 15,16 or alycyclic units. 17 Semifluorinated polyimides have got great attention in this regard from both academia and industry.…”

Synthesis and properties of 6FDA‐BisAAF‐PPD copolyimides for microelectronic applications

“…3 The introduction of fluorine into polyimide will significantly decrease the dielectric constant, reduce moisture absorption, and improve the optical property. [3][4][5][6][7][8] However, COF bonding also will reduce the glass-transition temperature (T g ) of polyimide. 7 In addition to dielectric constant, the water absorption, chemical properties, T g , thermal stability, and mechanical properties of the polymers also are critical for the application of IMD because the dielectrics must survive the postannealing and chemical mechanical polishing (CMP) process.…”

Polyimides. IV. Synthesis and characterization of fluorinated copolyimides

“…5 Thus, the polyimides based on trifluoromethyl groups have been reported to be soluble in amide, ketones, and chlorinated hydrocarbons. 6,7 Other means of solubilization of polyimides includes the introduction of flexible linkages, 8,9 bulky substituents, 10,11 or bulky units in the polymer backbone [12][13][14] or noncoplanar 15,16 or alycyclic 17 monomers. ODA is widely used in the synthesis of polyimides, but the polyimides synthesized from this diamine are insoluble or have poor solubility, depending on the dianhydride used.…”