Diaphragm-type sputtered platinum thin film strain gauge pressure transducer

Nayak, M.M.; Gunasekaran, Nallappan; Muthunayagam, A.E.; Rajanna, K.; Mohan, S.

doi:10.1088/0957-0233/4/12/002

Cited by 11 publications

(3 citation statements)

References 22 publications

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“…Although the coefficient of thermal expansion (CTE) of Pyrex is well matched to that of silicon in 0 • C-400 • C range [45], the CTE of silicon substantially decreases at low temperatures and turns to negative value below 140 K [33], while Pyrex maintains a CTE of 1.1 ppm/K even at 100 K [34]. This exerts compressive stress on the silicon membrane as temperature decreases, and alters resistivity of the thinfilm platinum [46]. Although the temperature sensor exhibits some variation compared with standard platinum RTDs which provides linear response down to 70 K [26], the phenomenon is repeatable, and once calibrated, it can provide accurate temperature readings.…”

Section: Discussionmentioning

confidence: 99%

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Park

Evans

Rasmussen

et al. 2009

J. Microelectromech. Syst.

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This paper reports on design, fabrication, and testing of a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures. One envisioned application is to control the flow of a cryogen for distributed cooling with a high degree of temperature stability and a small thermal gradient. The valve consists of a micromachined die fabricated from a silicon-on-insulator wafer, a glass wafer, a commercially available piezoelectric stack actuator, and Macor ceramic encapsulation that has overall dimensions of 1.5 × 1.5 × 1.1 cm 3 . A piezoresistive pressure sensor and a thin-film Pt resistance temperature detector are integrated on the silicon die. The assembly process allows the implementation of normally open, partially open, and normally closed valves. At room temperature, gas flow modulation from 200 to 0 mL/min is achieved from 0-to 40-V actuation. Flow modulation at various temperatures from room temperature to 205 K is also reported. The pressure sensor has sensitivity of 356 ppm/kPa at room temperature, with temperature coefficient of sensitivity of −6507 ppm/K. The temperature sensor has sensitivity of 0.29%/K. The valve and the sensors are tested across a wide range of temperatures, and the effect of temperature on performance is discussed.[ 2008-0253]Index Terms-Cooling systems, cryogenic, microelectromechanical systems (MEMS), piezoelectric, piezoresistive pressure sensor, resistance temperature detector (RTD).

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Section: Discussionmentioning

confidence: 99%

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Park

Evans

Rasmussen

et al. 2009

J. Microelectromech. Syst.

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“…This mismatch in coefficients of linear thermal expansion can give strain in the metal layers. Both Au [69][70][71] and Pt [72][73][74] are used as strain-sensitive gauges, and thus are sensitive to strain-induced geometry changes due to thermal expansion.…”

Section: Metal Adhesionmentioning

confidence: 99%

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters †

et al. 2020

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Fast point-of-use detection of, for example, early-stage zoonoses, e.g., Q-fever, bovine tuberculosis, or the Covid-19 coronavirus, is beneficial for both humans and animal husbandry as it can save lives and livestock. The latter prevents farmers from going bankrupt after a zoonoses outbreak. This paper describes the development of a fabrication process and the proof-of-principle of a disposable DNA amplification chip with an integrated heater. Based on the analysis of the milling process, metal adhesion studies, and COMSOL MultiPhysics heat transfer simulations, the first batch of chips has been fabricated and successful multiple displacement amplification reactions are performed inside these chips. This research is the first step towards the development of an early-stage zoonoses detection device. Tests with real zoonoses and DNA specific amplification reactions still need to be done.

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“…Most pressure sensors are made of silicon and employ strain gauges from doped silicon on a silicon membrane which are combined into a bridge circuit [1][2][3]. Another option is strain gauges made of metal conducting paths [4][5][6][7][8][9]. Normally pressure sensors are designed such that the deflection of the membrane is smaller than its thickness.…”

Section: Introductionmentioning

confidence: 99%

Metal strain gauges on membranes at large deflection

Schomburg

2013

Meas. Sci. Technol.

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The output signal of metal strain gauges on membranes combined into a half bridge was investigated at deflections larger than three times their thickness. It was discovered that the signal reaches a maximum and then decreases with increasing deflection. When the pressure was applied in the opposite direction, the signal went through a minimum and then rose with increasing deflection. This can be interpreted as a shape transition of the membrane when deflected by more than its thickness. Besides this, the asymmetry of the signal with respect to drops in pressure in opposite directions of the membrane indicates that straining of the neutral fiber of the membrane shows a notable effect. The bridge output was also investigated with strain gauges on bi-stable membranes buckling due to compressive residual stress either up or down when no pressure difference was applied.

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Diaphragm-type sputtered platinum thin film strain gauge pressure transducer

Cited by 11 publications

References 22 publications

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

A Microvalve With Integrated Sensors and Customizable Normal State for Low-Temperature Operation

Disposable DNA Amplification Chips with Integrated Low-Cost Heaters †

Metal strain gauges on membranes at large deflection

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