Diamond membranes with controlled stress for submicron lithography

Schäfer, Lothar; Bluhm, Andrea; Klages, Claus‐Peter; Löchel, Bernd; Buchmann, Leandro; Huber, H.-L.

doi:10.1016/0925-9635(93)90168-2

Cited by 19 publications

(9 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Other early important papers characterized the intrinsic stress of the material, [13,[20][21][22] and demonstrated low temperature and pressure deposition conditions. [23][24][25][26] As will be discussed later, these NCD materials were all grown in hydrogen-rich CVD environments, with typically less than 2% methane (or hydrocarbon) in hydrogen as reactants.…”

Section: Historical Overviewmentioning

confidence: 99%

“…NCD films exhibit a continuous variation in material properties and defect concentrations which depend on the growth methods, reactant species, substrate temperature, and reactor pressure. The methods include plasma-enhanced (PE)CVD (microwave, [9,12,[14][15][16]20,21,78,84,85] electron cyclotron resonance, [23][24][25] DC glow discharge, [86,87] and hot filament-assisted CVD. [88][89][90][91][92] In Table 1 several subclasses of NCD were identified based on the use of higher methane concentrations (1-4% CH 4 in H 2 ), [74] biased plasma (energetic ion flux), [77,78] nitrogen addition, [82,93] and very low CH 4 concentrations (0.1 to 0.5% CH 4 in H 2 ).…”

Section: Historical Overviewmentioning

confidence: 99%

“…In the late 1980s, the applications of NCD began with support membranes for absorber patterns in X-ray lithography, and X-ray transmission windows. [12][13][14][15][16][17][18][19][20][21] In these applications, properties such as stress, stiffness, surface smoothness, and to some degree optical transparency, were important. The tribological properties of UNCD have been exploited at both macroscale and micro/nanometer scale by demonstrating their use as a coating for the seals of rotating shafts [138] and as a monolithic AFM tip (Fig.…”

Section: Applicationsmentioning

confidence: 99%

See 2 more Smart Citations

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

329

261

View full text Add to dashboard Cite

The growth and characteristics of nanocrystalline diamond thin films with thicknesses from 20 nm to less than 5 mm are reviewed. These materials contain between 95% and >99.9% diamond crystallites, the balance being made up from other forms of carbon. Within this class of materials there is a continuous range of composition, characteristics, and properties which depend on the nucleation and growth conditions. It is convenient to classify these films as either ultra-nanocrystalline-diamond (UNCD) or nanocrystalline-diamond (NCD) based on their microstructure, properties, and growth environment. In general, UNCD materials are composed of small particles of diamond ca. 2-5 nm in size with sp 2 -carbon bonding between the particles. UNCD is usually grown in argon-rich, hydrogen-poor CVD environments, and may contain up to 95-98% sp 3 -bonded carbon. NCD materials start with high density nucleation, initiating nanometer-sized diamond domains which grow in a columnar manner with the grain size coarsening with thickness. NCD is generally grown in carbon-lean and hydrogen-rich environments. NCD and UNCD exhibit an interesting range of physical properties which find use in X-ray windows and lithography, micro-and nanomechanical and optical resonators, tribological shaft seals and atomic force microscopy (AFM) probes, electron field emitters, platforms for chemical and DNA sensing, and many other applications.

show abstract

Section: Historical Overviewmentioning

confidence: 99%

Section: Historical Overviewmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

See 1 more Smart Citation

The CVD of Nanodiamond Materials

Butler

Sumant

2008

Chemical Vapor Deposition

329

261

View full text Add to dashboard Cite

show abstract

“…One of the first applications of NCD films was as support membranes for absorber patterns in Xray photolithography and X-ray transmission windows [133,135]. More recently, they have been incorporated into silicon on insulator (SOI) wafers [157,158].…”

Section: Ncd and Uncd Applicationsmentioning

confidence: 99%

“…NCD films can be deposited by different methods, such as MPCVD [132][133][134][135][136][137], Electron…”

Section: Ncd Film Growthmentioning

confidence: 99%

Diamond growth by chemical vapour deposition

Grácio¹,

Fan²,

Madaleno³

2010

J. Phys. D: Appl. Phys.

244

156

View full text Add to dashboard Cite

This paper reviews the growth of diamond by chemical vapour deposition (CVD). It includes the following seven parts: (1) Properties of diamond: this part briefly introduces the unique properties of diamond and their origin and lists some of the most common diamond applications. (2) Growth of diamond by CVD: this part reviews the history and the methods of growing CVD diamond. (3) Mechanisms of CVD diamond growth: this part discusses the current understanding on the growth of metastable diamond from the vapour phase. (4) Characterization of CVD diamond: we discuss the two most common techniques, Raman and XRD, which have been intensively employed for characterizing CVD diamond. (5) CVD diamond growth characteristics: this part demonstrates the characteristics of diamond nucleation and growth on various types of substrate materials. (6) Nanocrystalline diamond: in this section, we present an introduction to the growth mechanisms of nanocrystalline diamond and discuss their Raman features. This paper provides necessary information for those who are starting to work in the field of CVD diamond, as well as for those who need a relatively complete picture of the growth of CVD diamond.

show abstract

CVD Diamond for X-ray Windows and Lithography Mask Membranes

Bachmann

Wiechert

1998

Low-Pressure Synthetic Diamond

View full text Add to dashboard Cite

Diamond membranes with controlled stress for submicron lithography

Cited by 19 publications

References 17 publications

The CVD of Nanodiamond Materials

The CVD of Nanodiamond Materials

Diamond growth by chemical vapour deposition

CVD Diamond for X-ray Windows and Lithography Mask Membranes

Contact Info

Product

Resources

About