“…With the lacking of energy sources in recent years, the research on DLC films as anti-reflection coatings has attracted more and more attention, attributing to that DLC films have wide bandgaps, and adjustable refractive indices [3,4]. The DLC coated Si solar cells increase the solar cell efficiency by 20% [1], and the transmission efficiency in the infrared and visible regions is 68.83 and 85%, respectively, close to theoretical value for nonabsorption carbon material [5,6]. For the development of solar cells, the pure DLC anti-reflection coatings can not meet the requirements of photoconversion, such as low photoconversion efficiency, photoluminescence (PL), etc., of pure DLC films, thus doping elements into DLC films is attempted to improve the optical properties of DLC films [7].…”