Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

Park, Sejun; Kim, Dohyung; Lee, Seungmoo; Ha, Y.K.; Lim, Mingyoo; Kim, Kangsoo

doi:10.1016/j.tsf.2018.08.007

Cited by 23 publications

(8 citation statements)

References 11 publications

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“…In addition to the common first-order Raman peaks, the spectra of the nanocatalysts also revealed the presence of other vibrational modes [ 54 , 55 ], as indicated by the shoulder at ~1150–1154 cm −1 , as shown in Figure 7 by an asterisk (*). The observed shoulder (*) is assigned to sp 3 hybridized carbons of disordered diamond-like amorphous carbon [ 56 , 57 ]. The position and broadness of different vibrational bands in carbon-based nanomaterials can be used as a measure for quantifying local structural disorders [ 58 , 59 , 60 ].…”

Section: Resultsmentioning

confidence: 99%

Catalyst Design: Counter Anion Effect on Ni Nanocatalysts Anchored on Hollow Carbon Spheres

et al. 2023

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Herein, the influence of the counter anion on the structural properties of hollow carbon spheres (HCS) support was investigated by varying the nickel metal precursor salts applied. TEM and SEM micrographs revealed the dimensional dependence of the HCS shell on the Ni precursor salt, as evidenced by thick (~42 nm) and thin (~23 nm) shells for the acetate and chloride-based salts, respectively. Importantly, the effect of the precursor salt on the textural properties of the HCS nanosupports (~565 m2/gNi(acet)) and ~607 m2/gNiCl), influenced the growth of the Ni nanoparticles, viz for the acetate-(ca 6.4 nm)- and chloride (ca 12 nm)-based salts, respectively. Further, XRD and PDF analysis showed the dependence of the reduction mechanism relating to nickel and the interaction of the nickel–carbon support on the type of counter anion used. Despite the well-known significance of the counter anion on the size and crystallinity of Ni nanoparticles, little is known about the influence of such counter anions on the physicochemical properties of the carbon support. Through this study, we highlight the importance of the choice of the Ni-salt on the size of Ni in Ni–carbon-based nanocatalysts.

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Section: Resultsmentioning

confidence: 99%

Catalyst Design: Counter Anion Effect on Ni Nanocatalysts Anchored on Hollow Carbon Spheres

et al. 2023

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“…It should be noted that our nitrogen-doped amorphous carbon made by the DC sputtering process is denser than nitrogen-doped amorphous carbon made by the PE-CVD process. 11,17 This means that amorphous carbon thin lms made by the DC sputtering process are expected to be effective in manufacturing the excellent hardmasks, because they contain less hydrogen than carbon thin lms made by the PE-CVD process.…”

Section: Basic Characteristics Of Nitrogen-doped Amorphous Carbon Lmsmentioning

confidence: 99%

“…However, amorphous carbon lms fabricated through PE-CVD inevitably contain hydrogen due to the CH-based precursor, which causes degradation of the physical properties according to the hydrogen concentration, making it challenging to obtain high-aspect-ratio patterning. [10][11][12][13][14] To overcome this problem and improve the performance of the hardmask, studies have been conducted to predict a method that may have high resistance to uorine, a major etching gas, through DFT calculation. As a result of the calculation, a method of controlling the amount of hydrogen bonded to carbon or doping other substances was suggested.…”

Section: Introductionmentioning

confidence: 99%

Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system

et al. 2023

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“…It consists of sp 2 - and sp 3 -hybridized carbon atoms, and its physical properties are a function of hybridization ratios . The broad range of properties of carbon allotropes has made them appropriate for a wide variety of applications, important examples of which are substrates, optical components, heat sinks, electrodes, electronic devices, lubricants, hard masks, corrosion-resistive coatings, and diffusion barriers. − …”

Section: Introductionmentioning

confidence: 99%

Thermal Laser Epitaxy of Carbon Films

Kim,

Smart,

Mannhart

et al. 2023

Crystal Growth & Design

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Synthesizing carbon films by thermal evaporation is challenging due to carbon's refractory nature, which entails extremely high evaporation temperatures (>2000 °C). This study investigates thermal laser epitaxy (TLE) as a technique for carbon film growth. We use TLE to grow carbon films on c-plane sapphire substrates in a wide range of substrate temperatures (20−1800 °C). These studies show that the crystallinity of carbon films can be controlled by the substrate temperature during growth, where amorphous and nanocrystalline carbon forms at lower and higher temperatures, respectively. Carbon films grown at high temperatures are electrically more conductive and have smaller activation energies of defect states. Furthermore, this study characterizes the dependence of the growth rate on the power of the sourceevaporating laser beam. In addition, it demonstrates in situ growth of carbon films on Ni(111) films on c-plane sapphire substrates. Our results reveal the effectiveness of TLE in synthesizing a broad spectrum of carbon films that range from films of amorphous carbon to nanocrystalline carbon.

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Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

Cited by 23 publications

References 11 publications

Catalyst Design: Counter Anion Effect on Ni Nanocatalysts Anchored on Hollow Carbon Spheres

Catalyst Design: Counter Anion Effect on Ni Nanocatalysts Anchored on Hollow Carbon Spheres

Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system

Thermal Laser Epitaxy of Carbon Films

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