Physics and Applications of CVD Diamond 2008
DOI: 10.1002/9783527623174.ch7
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Diamond‐Based Acoustic Devices

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Cited by 3 publications
(2 citation statements)
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“…The acoustic waves, consisting of bulk acoustic wave (BAW) and surface acoustic wave (SAW), are caused by density fluctuations in matters and provide information about the elasticity, electrostriction, and thermal capacity of materials [1][2][3][4] . Both the SAW-based and BAW-based devices have been widely applied in the communication 6 1.277 10 ´6 1.727 10 ´ and sensing devices, such as acoustic radio frequency (RF) filter, resonator and SAW microelectromechanical systems (MEMS) [5][6][7][8] . The use of micro-acoustic devices greatly shrunk the size of signal processor in the field of communications.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…The acoustic waves, consisting of bulk acoustic wave (BAW) and surface acoustic wave (SAW), are caused by density fluctuations in matters and provide information about the elasticity, electrostriction, and thermal capacity of materials [1][2][3][4] . Both the SAW-based and BAW-based devices have been widely applied in the communication 6 1.277 10 ´6 1.727 10 ´ and sensing devices, such as acoustic radio frequency (RF) filter, resonator and SAW microelectromechanical systems (MEMS) [5][6][7][8] . The use of micro-acoustic devices greatly shrunk the size of signal processor in the field of communications.…”
Section: Introductionmentioning
confidence: 99%
“…Diamond shows excellent performance in the high-frequency and high-power acoustic wave devices, thanks to its superhigh elastic modulus and thermal conductivity, stable chemical property as well as low thermal expansion coefficient and dielectric constant [10] . The piezoelectric film/diamond multilayer structure has been extensively applied in high-frequency and high-power SAW devices [11][12][13] .…”
Section: Introductionmentioning
confidence: 99%