DFM based on layout restriction and process window verification for sub-60nm memory devices

Choi, Soo-Han; Jung, Dai-Hyun; Hong, Ji-Suk; Choi, Joon-Ho; Yoo, Moon-Hyun; Kong, Jeong-Taek

doi:10.1117/12.728958

Cited by 3 publications

(3 citation statements)

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“…The first modification called ridge regression [6] is used to prevent any subset of the fitted coefficients from becoming overly large by incorporating the estimated coefficients in the residual squared sum(RSS) in equation (4). fˆ is the vector of contour/drawn measurements and D is the matrix of rasterized layout values associated with the measurements.…”

Section: Figure 7 -Drawn Layout Measurement Site Placementmentioning

confidence: 99%

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pRSM: models for model-based litho-hotspot repairs

2009

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Computing repair hints for litho hotspots is made more effective with a model of how Process Window contour bands changes as a function of design layout changes. We have developed a modeling methodology called pRSM (Partition Response Surface Model). In our approach, we create a family of models along with error bound estimate models. We first classify design layout configurations into a small number of partition categories and then build a RSM model and error bound model for each partition category. In this paper we describe our pRSM methodology and present results illustrating the advantages of our methodology over that of traditional RSM approaches.

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Section: Figure 7 -Drawn Layout Measurement Site Placementmentioning

confidence: 99%

“…One approach is to avoid generating layout structure either through the use of restricted design rules [4] [11] [12] or embedding algorithms for avoidance of litho hotspot susceptible structures into the physical implementation tools [3] [5] [7] [13] . The second approach is based on repairing any litho-hotspots found by a checking tool.…”

Section: Previous Workmentioning

confidence: 99%

pRSM: models for model-based litho-hotspot repairs

2009

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“…One approach is to avoid generating layout structure either through the use of restricted design rules [3][9][10] [11] or embedding algorithms for avoidance of litho hotspot susceptible structures into the physical implementation tools [2][4] [5] [12] , i.e. correct by construction.…”

Section: Previous Workmentioning

confidence: 99%

Model-based hints for litho-hotspots repair

et al. 2009

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A litho hotspot repair hints requires the specifications of how layout edges should be modified. Identifying how layout edges not directly touching the hotspot region is challenging to encode in a rule set. We propose an approach using models called Partition Response Surface Models (pRSM) to estimate the contours changes due to design layout modifications. In this paper we present details of litho hotspot repair hint engine which uses the pRSM models to compute the shape changes amount to resolve a litho hotspot and which can accept constraints from both design considerations or design rule considerations.

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