2005 IEEE International Symposium on Circuits and Systems
DOI: 10.1109/iscas.2005.1464512
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Device Technology for Body Biasing Scheme

Abstract: Abstract-We report power-aware 65-nm node CMOS device technology suitable for body biasing scheme. For highperformance CMOS, both channel and halo profiles have been optimized to enhance the body-bias effect of 45-nm gate length devices. Standby leakage reduction without device reliability compromise has been demonstrated with simultaneous voltage control of body bias and power supply. Moreover, high-k gate dielectric "HfSiON" has been adopted to reduce both gate leakage and GIDL, which are the dominant standb… Show more

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Cited by 10 publications
(6 citation statements)
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“…Previous works [17], [18] have shown that for thinner gate oxides, the amount of degradation due to NBTI increases with an increase in Î . This is caused by increased electric fields that result in higher rates of breakdown of the weak Ë À bonds according to the equations [4], [13]:…”
Section: E ¡î ø Dependence On Supply Voltagementioning
confidence: 90%
“…Previous works [17], [18] have shown that for thinner gate oxides, the amount of degradation due to NBTI increases with an increase in Î . This is caused by increased electric fields that result in higher rates of breakdown of the weak Ë À bonds according to the equations [4], [13]:…”
Section: E ¡î ø Dependence On Supply Voltagementioning
confidence: 90%
“…Therefore, there exists an optimum RBB value that yields the lowest combined subthreshold and BTBT leakage, and this RBB value decreases in magnitude as the technology scales [23]. However, some works such as [25] have successfully implemented a RRB technique in a 65nm technology node by optimizing the device parameters.…”
Section: Discussionmentioning
confidence: 99%
“…2) Therefore, much work for reducing the initial I OFF has been researched. [3][4][5][6][7][8][9][10] Among them, the variable body bias technique is an attractive method because it decreases the initial I OFF only at a reverse body bias without any change in the process. 7) The various stresses during the device operation can also increase the initial I OFF .…”
Section: Introductionmentioning
confidence: 99%