Device layer transferred poly-Si TFT array for high resolution liquid crystal projector

Abstract

ABSTRUCTThe authors propose an active-matrix liquid crystal light valve (LCLV) for a high resolution projector. using device layer transfer technology. This new LCLV will be free from an issue of high density interconnection between bus lines and Si IC drivers. To confirm the validity of this proposal. a high-performance poly-Si TFT array with 480x768 pixels in 80 mm diagonal has been fabricated on oxidized Si wafer. This TFT has triple gate structure for o b t a i n i n g hi g h ON / OFF cur r e n t rat i 0 ; B I P structure and ITO barrier metal for reduc ing defects. This TFT array was transferred on to transparent glass substrate USing device layer transfer technology and the liquid crystal projector waS successfully realized.