2010
DOI: 10.3901/jme.2010.15.161
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Development Research of Science and Technologies in Ultra-precision Machining Field

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Cited by 53 publications
(23 citation statements)
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“…Due to their high precision, near-zero friction, no pollution and satisfactory thermal stability, aerostatic bearings have been widely used in precision manufacturing equipment and ultra-precision positioning and measuring instruments. [1][2][3] Due to the high-precision requirements in precision manufacturing and measurement, the previously neglected factors that affected the performance of aerostatic bearings have been gradually considered. [4][5][6] The main challenges that are encountered in increasing the stability and accuracy of aerostatic bearings are the fluctuation and microvibration of the flow field.…”
Section: Introductionmentioning
confidence: 99%
“…Due to their high precision, near-zero friction, no pollution and satisfactory thermal stability, aerostatic bearings have been widely used in precision manufacturing equipment and ultra-precision positioning and measuring instruments. [1][2][3] Due to the high-precision requirements in precision manufacturing and measurement, the previously neglected factors that affected the performance of aerostatic bearings have been gradually considered. [4][5][6] The main challenges that are encountered in increasing the stability and accuracy of aerostatic bearings are the fluctuation and microvibration of the flow field.…”
Section: Introductionmentioning
confidence: 99%
“…Although nano-ceramic materials can be processed by the ultra-precision machining technology, the theoretical basis of research on ultra-precision machining of the hard and brittle material technology in China is relatively weak. It is still a long process from industrialization [1][2][3].…”
Section: Introductionmentioning
confidence: 99%
“…It needs not only shape tools or fine abrasives, but also good dynamic performance and high-accuracy micro feed system more importantly [9,10], as the direct and hard contact between tool and work-piece in machine work, the vibration of machine tool is easy to reflect on the machined surface. To date, some researchers have studied the dynamic performance of ultra-precision cutting machine tool; Liang et al [11] presented a dynamic optimization of an ultraprecision diamond flycutting machine tool, successfully produced 415 × 415-mm surfaces on aluminum and crystalline optics, with 1.3-μm flatness and 2.4-nm rms roughness.…”
Section: Introductionmentioning
confidence: 99%