Development of Wide Bandgap Semiconductor Photonic Device Structures by Excimer Laser Micromachining

We investigate the shear-horizontal surface acoustic waves ͑SH-SAWs͒ generated on an AlN/Al 2 O 3 microstructure by laser-micromachined grooves on the AlN film. In the absence of grooves, the AlN/Al 2 O 3 device shows resonance for only a lower velocity SAW mode. However, when grooves of periodicity smaller than half the wavelength of the surface acoustic wave are micromachined, a higher velocity resonance due to a SH-SAW mode is observed in the device. It is found that our SH-SAW mode remains undamped and is able to propagate across the device when loaded with a biofluidic mass. We have also measured the mass sensitivity of the SH-SAW mode under biofludic load in terms of frequency shift. Measurements show that this mode has a very high mass sensitivity of the order 1.35 ng/ml, which suggests that the device can be applied for the detection of a small concentration of antigens in a biofluid. In this article, the fabrication and grooving techniques of the device are also addressed.

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“…This system has demonstrated the capability of clean cutting with less thermal effect and precise control over customized micropattern. 25…”

Section: B Design and Fabrication Of The Devicementioning

confidence: 99%

Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure

Thakur

Zhong

et al. 2004

Journal of Applied Physics

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Development of aluminum nitride-based acoustic wave sensors

Ying

Auner

2002

Proceedings of the Second Joint 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society] [Engi

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AlN Acoustic Wave Sensors Using Excimer Laser Micromachining Techniques

2000

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Aluminum Nitride (AlN) is a promising piezoelectric material for Acoustic Wave (AW) sensor application due to its high acoustic velocity, linear thermal coefficient and high electromechanical coupling coefficient. Epitaxial AlN thin films were successfully grown on the Sapphire C plane substrate by Plasma Source Molecular Beam Epitaxy (PSMBE). Standard two-port resonator structures were fabricated on the AlN/Sapphire by standard photolithography. Excimer laser micromachining techniques were utilized to fabricate microgroove gratings on the surface of thin film. Beside Surface Acoustic Wave (SAW), Surface Transverse Wave (STW) propagation was also found on the devices with those microgroove and classical metal strip gratings. Laser micromachinined microgroove gratings were found to enhance the propagation of STW. Further, sensors based on STW showed little attenuation in the liquid environment, while sensors based on SAW suffered excess loss when exposed to liquid.

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Development of Wide Bandgap Semiconductor Photonic Device Structures by Excimer Laser Micromachining

Cited by 3 publications

References 6 publications

Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure

Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure

Development of aluminum nitride-based acoustic wave sensors

AlN Acoustic Wave Sensors Using Excimer Laser Micromachining Techniques

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