2004
DOI: 10.1063/1.1753660
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Propagation of a shear-horizontal surface acoustic mode in a periodically grooved AlN/Al2O3 microstructure

Abstract: We investigate the shear-horizontal surface acoustic waves ͑SH-SAWs͒ generated on an AlN/Al 2 O 3 microstructure by laser-micromachined grooves on the AlN film. In the absence of grooves, the AlN/Al 2 O 3 device shows resonance for only a lower velocity SAW mode. However, when grooves of periodicity smaller than half the wavelength of the surface acoustic wave are micromachined, a higher velocity resonance due to a SH-SAW mode is observed in the device. It is found that our SH-SAW mode remains undamped and is … Show more

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Cited by 18 publications
(15 citation statements)
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“…Since the exact mode number in the experiment could not be identified, the order of one mode ͑m =7͒ was arbitrary selected to fit the frequency values. We were not able to observe the Rayleigh waves, in contrast to earlier observations, 8 where the grating was formed only on the SAW path between the IDTs. Possibly, the presence of the grating structure in the IDT regions in our case might have caused the excitation of the Rayleigh wave to be suppressed by transferring its energy to SH modes.…”
contrasting
confidence: 83%
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“…Since the exact mode number in the experiment could not be identified, the order of one mode ͑m =7͒ was arbitrary selected to fit the frequency values. We were not able to observe the Rayleigh waves, in contrast to earlier observations, 8 where the grating was formed only on the SAW path between the IDTs. Possibly, the presence of the grating structure in the IDT regions in our case might have caused the excitation of the Rayleigh wave to be suppressed by transferring its energy to SH modes.…”
contrasting
confidence: 83%
“…Excitation of the acoustic waves faster than the Rayleigh waves has been observed in AlN-onsapphire structure with periodically grooved surface. 8 Similarly, the periodic columnar structure of AlN formed by ELOG technique seems to stimulate the excitation of plate modes in our case. The enhancement of the surface acoustic wave type conversion by periodical gratings was analyzed in Ref.…”
mentioning
confidence: 91%
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“…Shearhorizontal SAWs are attractive, for instance, for biosensing applications, 13 as their damping resulting from the loading of biofluidic materials is negligible. 14 We note that the emergence of the acoustic vibration in the sagittal plane, which enables the excitation of the Love-type mode by IDTs, also leads to a damping when the SAW propagation path is loaded with fluid. It is thus desirable for such applications that the SAW condition be shifted away from the mode proximity region after the launch of the Love-type mode from IDTs, for instance, by adiabatically varying the layer thickness.…”
Section: Y Takagakimentioning
confidence: 99%
“…[13][14][15][16] In particular, shear horizontal ͑SH͒ polarized modes which do exist on substrates or metal samples when ridges are milled, grown or adsorbed onto them are widely used in connection with viscosity, gas, and ͑bio͒chemical sensing such as nondestructive testing. [17][18][19] The wave motion of a nonpiezoelectric, isotropic elastic material is governed by the general lossless equation of motion:…”
Section: Collimation Of Horizontally Polarized Shear Waves By Means Omentioning
confidence: 99%