Development of various designs of low-power, MEMS valves for fluidic applications

Cardenas-Valencia, Andres M.; Dlutowski, J.; Bumgarner, John; Munoz, Christel M.; Wang, W.; Popuri, R.; Langebrake, Larry

doi:10.1016/j.sna.2006.12.016

Cited by 20 publications

(14 citation statements)

References 29 publications

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“…When higher currents were applied to compensate for the increased heat loss to the fluid, premature failure of the Pt element was observed before complete valve opening. The current overshoot provided by the power supply was less than 1%, so trace failure may be attributed to other causes such as thermal stress induced by the difference of the coefficients of thermal expansion between Pt and Parylene (e.g., Pt of 9.1 × 10 −6 /°C versus Parylene of 3.5 × 10 −5 /°C) or electromigration (the atoms in the Pt trace are removed due to the impact with high-energy electrons) [5], [10]. Therefore, current ramping was applied to optimize the heat transfer to the Parylene membrane for operation in water/liquid.…”

Section: Resultsmentioning

confidence: 99%

A Parylene MEMS Electrothermal Valve

Givrad

Holschneider

et al. 2009

J. Microelectromech. Syst.

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The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.

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Section: Resultsmentioning

confidence: 99%

A Parylene MEMS Electrothermal Valve

Givrad

Holschneider

et al. 2009

J. Microelectromech. Syst.

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show abstract

“…Also, mechanical micro valves and vents are currently being developed for the development of automated batteries [45,46].…”

Section: Conclusion and Final Considerationsmentioning

confidence: 99%

Novel enhancement of thin-form-factor galvanic cells: Probing halogenated organic oxidizers and metal anodes

Cardenas-Valencia¹,

Adornato²,

Short³

et al. 2008

Journal of Power Sources

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“…Normally-closed MEMS electrothermal valves capable of rapid opening provide a potential solution for the new MIP system. Previously, electrothermal valves have been developed but only one of these is suited for implantable drug delivery (Table 1) [3][4][5][6][7][8]. This valve consists of a resistive metallic membrane (Pt/Ti/Pt) suspended over a drug reservoir that opens when an applied current melts the membrane.…”

Section: Figure 1: Miniature Bolus Infusion Pump For Neuroimaging In Micementioning

confidence: 99%

A Wirelessly–activated Parylene Electrothermal Valve for Mapping Brain Function in Freely Moving Subjects

Li¹,

Givrad²,

Holschneider³

et al. 2008

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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The first normally-closed Parylene valve operating on electrothermal principles for rapid and wireless drug delivery was designed, fabricated, modeled, and tested. This valve is a key component of an implantable microbolus infusion pump (MIP) for neuroimaging in freely-moving untethered animals. This low-power, lightweight MEMS valve enables an MIP suitable for studying functional brain activation in genetically engineered mice by replacing a large conventional solenoid valve used previously in larger animals.

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Development of various designs of low-power, MEMS valves for fluidic applications

Cited by 20 publications

References 29 publications

A Parylene MEMS Electrothermal Valve

A Parylene MEMS Electrothermal Valve

Novel enhancement of thin-form-factor galvanic cells: Probing halogenated organic oxidizers and metal anodes

A Wirelessly–activated Parylene Electrothermal Valve for Mapping Brain Function in Freely Moving Subjects

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