Development of stick–slip nanopositioning stage capable of moving in vertical direction

Pan, Peng; Zhu, Junhui; Gu, Sen; Ru, Changhai

doi:10.1007/s00542-020-04909-3

Cited by 11 publications

(10 citation statements)

References 23 publications

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“… ( a ) Schematic of the developed stick-slip positioning stage. Reproduced with permission from [ 31 ]; ( b ) zoom in on the different hinges (A, B, C). …”

Section: Figurementioning

confidence: 99%

“… Schematic of the flexure hinges to adjust friction force: ( a ) the structure of flexure hinge; ( b ) force diagram of the flexure hinge. Reproduced with permission from [ 31 ]. …”

Section: Figurementioning

confidence: 99%

“… ( a ) Constructed stage. Reproduced with permission from [ 31 ]; ( b ) experimental system for performance measurement. …”

Section: Figurementioning

confidence: 99%

“… ( a ) Principle of stick-slip driving; ( b ) conventional driving signal. Reproduced with permission from [ 31 ]. …”

Section: Introductionmentioning

confidence: 99%

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A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure

et al. 2020

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The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the stage, which influences the load capacity, dynamic performance, and positioning accuracy of the PASSNS. Toward solving the influence problems of friction force, this paper presents a novel stick-slip nanopositioning stage where the flexure hinge-based friction force adjusting unit was employed. Numerical analysis was conducted to estimate the static performance of the stage, a dynamic model was established, and simulation analysis was performed to study the dynamic performance of the stage. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the maximum forward and backward movement speeds of the stage are 1 and 0.7 mm/s, respectively, and the minimum forward and backward step displacements are approximately 11 and 12 nm, respectively. Compared to the step displacement under no working load, the forward and backward step displacements only increase by 6% and 8% with a working load of 20 g, respectively. And the load capacity of the PASSNS in the vertical direction is about 72 g. The experimental results confirm the feasibility of the proposed stage, and high accuracy, high speed, and good robustness to varying loads were achieved. These results demonstrate the great potential of the developed stage in many nanopositioning applications.

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“… ( a ) Schematic of the developed stick-slip positioning stage. Reproduced with permission from [ 31 ]; ( b ) zoom in on the different hinges (A, B, C). …”

Section: Figurementioning

confidence: 99%

“… Schematic of the flexure hinges to adjust friction force: ( a ) the structure of flexure hinge; ( b ) force diagram of the flexure hinge. Reproduced with permission from [ 31 ]. …”

Section: Figurementioning

confidence: 99%

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A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure

et al. 2020

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“…Another kind of method involved the design of the piezoelectric and flexure hinge mechanism as one driving module, such that the contact force between the slider and flexure hinge mechanism could be adjusted manually when the load increased. Yang et al and Pan et al adopted the second method to design new piezoelectric stick-slip-driven nanopositioners with high loads, as shown in figure 2(f) [19,20]. However, all these designs increased the size of the nanopositioners, and no practical applications were found.…”

Section: Introductionmentioning

confidence: 99%

Development of a piezoelectric hybrid-driven nanopositioner using combined leaf-spring-shaped and C-shaped flexure hinge mechanism

2024

Phys. Scr.

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This paper presents a novel piezoelectric hybrid-driven nanopositioner using combined leaf-spring-shaped and C-shaped flexure hinge mechanism. The piezoelectric hybrid-driven nanopositioner combines the piezoelectric stick-slip-driven nanopositioner and piezoelectric scanner in a single and compact device. This advance can decrease the size of nanoscratch-AFM hybrid system and make nanoscratch-AFM hybrid system compatible with the limited space of SEM vacuum chamber. A flexure hinge combining leaf-spring-shaped mechanism and C-shaped mechanism is developed to improve the load capability of piezoelectric stick-slip-driven nanopositioner. Unlike existing methods of improving load-capability by decreasing kinetic friction force value, the proposed flexure hinge employs C-shaped structure to decrease the retraction motion time of kinetic friction force, which can achieve high-load and compact structure simultaneously. Finite element analysis is implemented to optimize the thickness of the leaf-spring-shaped mechanism and diameter of the C-shaped mechanism. A prototype is fabricated and its experimental system is established. The mechanical output experiments show that the piezoelectric scanner achieved a maximum travel range of 4.9 μm, and piezoelectric stick-slip-driven nanopositionerm achieves a maximum load of 2 Kg. Experimental results of the nanoscratch-AFM hybrid system inside a standard SEM HITACHI SU5000 demonstrate that the proposed piezoelectric hybrid-driven nanopositioner is capable of nanoscratch positioning.

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Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.

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Development of stick–slip nanopositioning stage capable of moving in vertical direction

Cited by 11 publications

References 23 publications

A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure

A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure

Development of a piezoelectric hybrid-driven nanopositioner using combined leaf-spring-shaped and C-shaped flexure hinge mechanism

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

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