Development of a piezoelectric hybrid-driven nanopositioner using combined leaf-spring-shaped and C-shaped flexure hinge mechanism
Sen Gu
Abstract:This paper presents a novel piezoelectric hybrid-driven nanopositioner using combined leaf-spring-shaped and C-shaped flexure hinge mechanism. The piezoelectric hybrid-driven nanopositioner combines the piezoelectric stick-slip-driven nanopositioner and piezoelectric scanner in a single and compact device. This advance can decrease the size of nanoscratch-AFM hybrid system and make nanoscratch-AFM hybrid system compatible with the limited space of SEM vacuum chamber. A flexure hinge combining leaf-spring-shape… Show more
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