Development of secondary ion mass spectroscopy using medium energy C60 ion impact

Hirata, Koichi; Saitoh, Yoichi; Chiba, Ayano; Adachi, Masahiro; Yamada, K.; Narumi, K.

doi:10.1016/j.nimb.2008.03.019

Cited by 14 publications

(7 citation statements)

References 14 publications

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“…The TOF SI mass spectra for the targets were obtained using pulsed C 8 and C 60 primary ions produced by a 3 MV tandem accelerator 9-11 and a 400 kV ion implanter at the Japan Atomic Energy Agency (JAEA)/Takasaki, 9,12 respectively. A schematic diagram of target holder and TOF mass spectrometer is shown in Fig.…”

Section: Methodsmentioning

confidence: 99%

“…The averaged N 1, pulse was also set at much less than 1. 12 The vertical axis for each SSIC spectrum in Figs. 6 and 7 were scaled, based on the P-SI yield per C 60 impact qI P /I 0 (q: primary ion charge number, I P : P-SI total current, I 0 : incident beam current) for each irradiation condition, which makes comparison of the SI yields per primary C 60 ion among the spectra possible.…”

Section: B Counting System For Quantitative Secondary Ion Mass Analymentioning

confidence: 99%

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Secondary ion counting for surface-sensitive chemical analysis of organic compounds using time-of-flight secondary ion mass spectroscopy with cluster ion impact ionization

Hirata

Saitoh

Chiba

et al. 2011

Review of Scientific Instruments

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We report suitable secondary ion (SI) counting for surface-sensitive chemical analysis of organic compounds using time-of-flight (TOF) SI mass spectroscopy, based on considerably higher emission yields of SIs induced by cluster ion impact ionization. A SI counting system for a TOF SI mass spectrometer was developed using a fast digital storage oscilloscope, which allows us to perform various types of analysis as all the signal pulses constituting TOF SI mass spectra can be recorded digitally in the system. Effects of the SI counting strategy on SI mass spectra were investigated for C(8) and C(60) cluster ion impacts on an organically contaminated silicon wafer and on polytetrafluoroethylene targets by comparing TOF SI mass spectra obtained from the same recorded signals with different SI counting procedures. Our results show that the use of a counting system, which can cope with high SI yields, is necessary for quantitative analysis of SI mass spectra obtained under high SI yield per impact conditions, including the case of cluster ion impacts on organic compounds.

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Section: Methodsmentioning

confidence: 99%

Section: B Counting System For Quantitative Secondary Ion Mass Analymentioning

confidence: 99%

Secondary ion counting for surface-sensitive chemical analysis of organic compounds using time-of-flight secondary ion mass spectroscopy with cluster ion impact ionization

Hirata

Saitoh

Chiba

et al. 2011

Review of Scientific Instruments

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“…Various primary cluster ions have been shown to enhance the emission yield of intact large molecular ions from specimens, (e.g., organic polymer materials or biomolecules) compared to monatomic primary ions. Furthermore, it has been confirmed that the emission yield of large molecular ions increases with the energy of C 60 primary ions [16,17]. Combining SIMS with swift C 60 ion beams might offer a powerful tool for the analysis of organic polymer materials, organic and inorganic composites, and biomolecular samples, etc.…”

Section: Introductionmentioning

confidence: 96%

Novel Approaches for Intensifying Negative C60 Ion Beams Using Conventional Ion Sources Installed on a Tandem Accelerator

Chiba

Usui

Hirano

et al. 2020

QuBS

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We developed novel methods for producing negative C60 ion beams at the accelerator facility Takasaki Ion Accelerators for Advanced Radiation Application (TIARA) to increase the current intensity of swift C60 ion beams accelerated to the MeV energy region using a tandem accelerator. We produced negative C60 ion beams with an intensity of 1.3 µA, which is several tens of thousands of times greater than the intensity of beams produced using conventional methods based on the Cs sputtering process. These beams were obtained by temporarily adding an ionization function based on electron attachment to an existing ion source that is widely used in tandem accelerators. The high-intensity swift C60 ion beams can be made available relatively easily to institutes that have tandem accelerators and ion sources of the type used at TIARA because there is no need to change existing ion sources or install new ones.

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“…1 An ion beam of fullerene (C 60 ), which is a carbon cluster, is required for highly sensitive secondary ion mass spectrometry 2, 3 and for the study of fundamental physics. 4 Therefore, fullerene ions have been produced in many facilities using ion sources.…”

Section: Introductionmentioning

confidence: 99%

Production of fullerene ions by combining of plasma sputtering with laser ablation

Yamada

Saitoh

Yokota

2013

Review of Scientific Instruments

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We have produced C60 ion beams by combining plasma sputtering and laser ablation. A C60 sample was placed in an electron cyclotron resonance type ion source, negatively biased and sputtered by argon plasma. The beam current of C60 (+) decreased rapidly, but it was transiently recovered by a single laser shot that ablates the thin sample surface on the sputtered area. Temporal variations in beam current are reported in response to laser shots repeated at intervals of a few minutes.

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Development of secondary ion mass spectroscopy using medium energy C60 ion impact

Cited by 14 publications

References 14 publications

Secondary ion counting for surface-sensitive chemical analysis of organic compounds using time-of-flight secondary ion mass spectroscopy with cluster ion impact ionization

Secondary ion counting for surface-sensitive chemical analysis of organic compounds using time-of-flight secondary ion mass spectroscopy with cluster ion impact ionization

Novel Approaches for Intensifying Negative C60 Ion Beams Using Conventional Ion Sources Installed on a Tandem Accelerator

Production of fullerene ions by combining of plasma sputtering with laser ablation

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