Development of RF based capacitively coupled plasma system for tungsten nano layer deposition on graphite

Chauhan, Sachin; Sharma, Uttam; Sharma, Jayshree; Sanyasi, A. K.; Ghosh, Joydeep; Yadava, Nandini; Choudhary, K. K.; Ghosh, Shreya

doi:10.1088/2053-1591/aadd8a

Cited by 3 publications

(2 citation statements)

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“…It confines the high temperature plasma in the limiter as well as divertor configurations. The graphite limiter or divertor tiles of ADITYA-U tokamak are planned to be coated with tungsten using PACVD technique in the reactor [6]. For this purpose, at the Shri Vaishnav Institute of Technology and Science (SVITS), Indore a coating reactor based upon capacitively coupled RF plasma is fabricated for producing tungsten coated graphite tiles using PACVD technique to be tested as a part of first wall components in ADITYA-U tokamak [6,7].…”

Section: Introductionmentioning

confidence: 99%

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Vibrational Temperature Estimation of Nitrogen Molecules in Radio-Frequency (RF) Produced Plasma

Yadava

Chouhan²,

Sanyasi

et al. 2022

Plasma and Fusion Research

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A capacitive coupled radio frequency (RF) plasma system has been developed for producing tungsten coated graphite tiles using plasma assisted chemical vapor deposition (PACVD) technique. To characterize the deposition chamber for optimal plasma parameters, small amount of air is released into the hydrogen plasma purposefully to measure its gas temperature using spectral bands of nitrogen molecule. Optical emission spectra in the wavelength range 350 to 900 nm have been recorded with a miniature spectrometer. Molecular spectral bands of N 2 (B 3 g -A 3 + u ) have been observed and identified as three bands from the nitrogen 1PS (Δν = 2, 3 & 4). These bands are simulated using MATLAB code developed in-house by considering Boltzmann distribution of particles in the vibrational states. The experimental spectra have been modelled with the simulated spectrum through the best-fit technique by iterating the latter one with different temperature values. Boltzmann plot method is also utilized to evaluate plasma gas temperature using identified vibrational bands. The estimated temperature using spectral modelling method matches fairly well with Boltzmann plot method. The estimated vibrational temperatures are in the range of ∼7000 -8000 K, an order higher than the room temperature ∼300 K.

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Section: Introductionmentioning

confidence: 99%

“…In this study, the experiment is performed in a PACVD reactor having plasma density in the range of ∼10 16 m −3 and electron temperature ∼1 eV [6]. The visible spectra are obtained by a spectrometer having spectral resolution of 0.2 nm.…”

Section: Introductionmentioning

confidence: 99%