2011
DOI: 10.1177/1045389x11414074
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Development of piezohydraulic actuator driven by piezomembrane pump

Abstract: A piezohydraulic actuator (piezopump-driven cylinder system) has the advantage over the conventional contact/non-contact piezoelectric motors in terms of achieving large thrust, high velocity, and long traveling distance. In this study, a serial-connection 5-chamber piezomembrane pump (SCCPP) was introduced and used for replacing piezostack pumps so as to decrease cost of piezohydraulic actuators. The border-upon piezomembranes work in anti-phase, a SCCPP is equivalent to several single-chamber pumps running i… Show more

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Cited by 20 publications
(13 citation statements)
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“…Equation (15) shows that the initial chamber volume has a great effect on fluid compressibility. Furthermore, the opening height and check efficiency of check valve and reflux in different chambers also changed with fluid compressibility (Kan et al, 2011). Thus, the pumping performance is further affected.…”
Section: Discussionmentioning
confidence: 99%
“…Equation (15) shows that the initial chamber volume has a great effect on fluid compressibility. Furthermore, the opening height and check efficiency of check valve and reflux in different chambers also changed with fluid compressibility (Kan et al, 2011). Thus, the pumping performance is further affected.…”
Section: Discussionmentioning
confidence: 99%
“…When single-chamber piezoelectric pumps are connected in serial, the output pressure and output flow rate with no external load are (Kan et al, 2008, 2011)…”
Section: Structure and Working Principlementioning
confidence: 99%
“…Azarbadegan et al (2010) analyzed and investigated a valveless PMHP with two chambers in parallel and serial connection and studied combination rules for multi-chamber PMHP. Kan et al (2011) developed a PMHP with five chambers in serial connection, which was used for replacing PSHP in hydraulic systems. At the driving voltage of 180 V, the thrust and velocity of the hydraulic system is 75 N and 9.8 mm/min, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…Typically, piezoelectrically-actuated pumps use a piezoelectric actuator to move a membrane in a chamber providing fluid delivery with the flow direction being controlled by check valves [11,12]. Applications can be found from micro-dosing drug administration to propelling microspacecraft [13,14,15,16,17]. …”
Section: Introductionmentioning
confidence: 99%