Development of measurement system for microstructures using an optical fiber probe: improvement of measurable region and depth

Abstract

The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. However, a limited measurement region and the unavailability of miniaturized probes are the major issues in the realization of such systems. In this study, we have presented a system for microstructures based on a small-diameter optical fiber probe. In the improved measurement system, the prism was installed near the stylus shaft to expand the measurable region and depth. This means that there is no limitation on the width of the measurement object. The standard deviation of the repeatability of the point measurement in the X-, Y- and Z-directions was 31, 38 and 19 nm, respectively. A pin gauge with a diameter of 100 µm was measured ten times for assessing the repeatability of measurements in the X- and Y-directions. The standard deviation of the diameter in these measurements was 25 nm. A step height standard with a calibrated height of 189.6 nm was measured ten times for assessing the repeatability of measurement in the Z-direction. The average height in these measurements was obtained as 200.2 nm with an expanded uncertainty of 49.3 nm (coverage factor k = 2). We confirmed that this system enabled accurate measurement in the X-, Y- and Z-directions.

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

“…Thus, the hinge-typed microprobe system can perform various functions by combining MEMS and semiconductor technologies and developing a hinge mechanism. The use of the optical fiber has been proposed as a different approach [101][102][103][104][105][106][107][108][109][110][111][112][113]. Figure 5 shows some of the examples.…”

“…For using an optical fiber, the contact of the probe tip to the measured surface is detected by measuring the deflection of the optical fiber stem using the optical method; furthermore, high resolutions are expected for this detection. The probe deflection can be measured with high resolution; however, the reproducibility of detection is difficult to The use of the optical fiber has been proposed as a different approach [101][102][103][104][105][106][107][108][109][110][111][112][113]. Figure 5 shows some of the examples.…”

“…Chemical treatment can be used to make a surface hydrophobic; however, there are certain disadvantages. The size of the microprobe system is larger than the abovementioned hinge-type probe because of the optical system [109,110]. Fiber Bragg gratings in an optical fiber can be used to detect the deflection of the fiber as an optical spectrum signal [78,101,102]; furthermore, the use of multiple fibers to simultaneously measure the position and detection direction [104,112] are two interesting examples.…”

High-Precision Fabrication of Micro Monolithic Tungsten Ball Tips via Arc Discharge and the Taguchi Method

“…These devices have high aspect ratio micro features and micrometer level precision requirements. The traditional noncontact measurement method cannot satisfy the requirements due to the low lateral resolution and limited longitudinal measurement range [ 1 , 2 , 3 ]. A high precision coordinate measuring machine (CMM) equipped with micro ball tips is required urgently.…”

Investigation of Factors Affecting Sensitivity Enhancement of an Optical Fiber Probe for Microstructure Measurement Using Oblique Incident Light

“…We have been developing a measurement system for microstructures using a stylus made of an optical fiber and prisms [8]. The probe shaft and tip are manufactured using a wet etching device and CO 2 laser processing [9].…”