2015
DOI: 10.1016/j.vacuum.2015.03.029
|View full text |Cite
|
Sign up to set email alerts
|

Development of magnetic-field and pulsed-plasma-enhanced chemical vapor deposition method to fabricate amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2016
2016
2019
2019

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 8 publications
references
References 12 publications
0
0
0
Order By: Relevance