2012
DOI: 10.1002/sia.4857
|View full text |Cite
|
Sign up to set email alerts
|

Development of laser ionization mass nanoscope (LIMAS)

Abstract: We have developed a new nano-beam time-of-flight secondary neutral mass spectrometry system: laser ionization mass nanoscope or LIMAS. The primary ion beam column was equipped with a Ga liquid metal ion source and aberration correction optics. The primary ion beam was down to 40 nm in diameter under a current of 100 pA with an energy of 20 keV. The sputtered particles were post-ionized under non-resonance mode by a femtosecond laser. The post-ionized ions were introduced into a multi-turn mass spectrometer. A … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
40
0

Year Published

2013
2013
2019
2019

Publication Types

Select...
7
1

Relationship

5
3

Authors

Journals

citations
Cited by 22 publications
(40 citation statements)
references
References 10 publications
0
40
0
Order By: Relevance
“…The absolute concentration at a given depth, however, is variable for each measurement because calibration factors from ion intensities to 4 He concentrations may vary with the measurement area. That is, because He has a much lower ionization efficiency by laser (~10%) than all other elements (~100%) (Ebata et al, 2012), the ionization efficiency of 4 He strongly depends on the laser photon density, i.e., the focusing conditions at the postionization position. Therefore, the extraction efficiency of each post-ionized ion for LIMAS would vary from spot to spot because the geometric relationship between the sputtering and the laser focusing changes slightly each time the sample moves.…”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…The absolute concentration at a given depth, however, is variable for each measurement because calibration factors from ion intensities to 4 He concentrations may vary with the measurement area. That is, because He has a much lower ionization efficiency by laser (~10%) than all other elements (~100%) (Ebata et al, 2012), the ionization efficiency of 4 He strongly depends on the laser photon density, i.e., the focusing conditions at the postionization position. Therefore, the extraction efficiency of each post-ionized ion for LIMAS would vary from spot to spot because the geometric relationship between the sputtering and the laser focusing changes slightly each time the sample moves.…”
Section: Resultsmentioning
confidence: 99%
“…An SNMS instrument called LIMAS (Ebata et al, 2012) was used for our measurements. A pulsed primary beam of 69 Ga (30 keV and 38 nA) was focused to a spot 800 nm in diameter on the sample surface of the DOS.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Imaging of smaller particles may become possible using recent instrument development efforts reported by Ebata et al [128]. Their study described the development of a new laser ionisation mass nanoscope, in which the primary 20 keV Ga + ion beam can be focused to a diameter of 40 nm.…”
Section: Secondary Neutral Mass Spectrometrymentioning
confidence: 99%
“…The other instrument, LIMAS (Laser Ionization Mass Nanoscope), has been installed at Hokkaido University, Japan [50]. This is a non-resonant, post-ionization mass spectrometer.…”
Section: Future Workmentioning
confidence: 99%