Development of ISFET array-based microsystems for bioelectrochemical measurements of cell populations

Martinoia, Sergio; Rosso, N.; Grattarola, M.; Lorenzelli, Leandro; Margesin, B.; Zen, M.

doi:10.1016/s0956-5663(01)00202-0

Cited by 88 publications

(48 citation statements)

References 18 publications

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“…3. For first six step fabrication steps are similar to that of technological module of a non standard 4-well ISFET/CMOS technology [10]. The fa 7-8 are related with the deposition and in sit the piezoelectric polymer film on the underlying MOS devices.…”

Section: Design and Fabricationmentioning

confidence: 99%

Design and fabrication of posfet devices for tactile sensing

Dahiya

Valle

Metta

et al. 2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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This work presents the design and fabrication of novel piezoelectric polymer-FET touch sensing devices. With thin piezoelectric polymer (PVDF-TrFE) film directly spun and processed in situ on the gate area of MOS transistor, the device can also be called as POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) touch sensing device. The integral POSFET "sensotronics" unit, comprising of transducer and the transistor, senses and conditions the signal at 'same site'. Challenging issues like in situ poling of piezoelectric polymer film, without damaging or altering the characteristics of underlying MOS devices, have been successfully dealt with.

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Section: Design and Fabricationmentioning

confidence: 99%

Design and fabrication of posfet devices for tactile sensing

Dahiya

Valle

Metta

et al. 2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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“…181 More recently, cell-based BioFETs with Si 3 N 4 or Al 2 O 3 as pH-sensitive gate insulators have been realised for extracellular acidification as well as for respiration (oxygen consumption) measurements. 176,177,[182][183][184][185][186][187][188] The principle of the extracellular acidification measurement with a cell-based BioFET can be briefly described as follows: usually, the measurements of the acidification rate are performed in a flow-through chamber with an array of cell-based BioFETs, operated in the flow-stop mode. Under steady-state conditions (pump on), one cell (approximately 10 5 -10 6 cells can be cultivated on a sensor chip) produces about ~10 8 protons per second.…”

Section: Cell-based Biofetmentioning

confidence: 99%

Recent advances in biologically sensitive field-effect transistors (BioFETs)

Schöning

Poghossian

2002

Analyst

541

339

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“…Recently, the same group showed the possibility of capacitive stimulation of specific ion channels using field effect transistors and recombinant HEK293 cells (Kupper et al (2002)). In general, dense arrays of transistors, called multi-transistor arrays, have been used in increasing frequency for the recording of electrical activity from different cell types (Ingebrandt et al (2001); Kind et al (2002); Lorenzelli et al (2003); Martinoia & Massobrio (2004); Martinoia et al (2001); Meyburg et al (2006)). …”

Section: Active Multitransistor Arraysmentioning

confidence: 99%

New Trends and Challenges in the Development of Microfabricated Probes for Recording and Stimulating of Excitable Cells

Braeken¹,

Prodanov²

2010

New Developments in Biomedical Engineering

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types of neural prostheses are unclear. Notable exceptions for this are the auditory cochlear prostheses, which exploit the sonotopic organization of the cochlea, the cardiac pacemakers, the phrenic stimulator and the foot drop stimulator. Current DBS systems for Parkinson's disease rely on the high frequency stimulation, which can result in blocking of certain mid-brain pathways. The encoding of the kinematic information in these structures is still unknown. Dissociated cell cultures lose their anatomical connectivity and structure when seeded on substrates in vitro. The 'new' situation that exists on these surfaces is interesting in terms of communication between individual cells and their function in advanced networks. However, the translation of these processes to the in vivo situation is not always straightforward and challenging. On the level of the overall device several types of issues can be grouped in the categories of configuration and operation. Issues related to the configuration can be related to the assembly, the size and topology of the device, the encapsulation and the packaging of the device. Devices have to be packaged in a way that prevents leakage of the environment, which contains high salt and protein concentrations, to the chip. These packages have to be leakage-proof on the one hand and non-toxic for the cell culture or tissue on the other hand. Issues related to the operation of the device can be grouped under the power, safety and communication of the device. The operation has to be compatible with cell cultures or in vivo environments, which in this case has to be in agreement with certain regulations. One other important aspect of the safety of operation are the interactions with other equipment, for example MRI.

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Development of ISFET array-based microsystems for bioelectrochemical measurements of cell populations

Cited by 88 publications

References 18 publications

Design and fabrication of posfet devices for tactile sensing

Design and fabrication of posfet devices for tactile sensing

Recent advances in biologically sensitive field-effect transistors (BioFETs)

New Trends and Challenges in the Development of Microfabricated Probes for Recording and Stimulating of Excitable Cells

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